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| Presentation | 2019-08-08 11:00 [Invited Talk] Low-Noise Low-Power MEMS Accelerometer with Digital Noise-Reduction Techniques Yuki Furubayashi, Takashi Oshima, Yudai Kamada, Atsushi Isobe (Hitachi, Ltd.)  SDM2019-43 ICD2019-8 Link to ES Tech. Rep. Archives: SDM2019-43 ICD2019-8 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | A fully integrated MEMS(Micro Electro Mechanical Systems) accelerometer with extremely low noise (22ng/√Hz) and sufficiently low power (17mW) was developed for emerging applications such as next-generation oil and gas exploration and infrastructure monitoring. It achieved 11x FoM and 1/9 noise level among state-of-the-art low-noise low-power MEMS accelerometers by applying a unique MEMS structure and noise reduction in the digital domain based on awareness of unfamiliar noise mechanisms. In this paper, as an application enabled by the noise performance, an example which has applied this sensor to the water-leakage detection is explained. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Accelerometer / MEMS / Low power / Low noise / Oil and gas exploration / Infrastructure monitoring / / | |
| Reference Info. | IEICE Tech. Rep., vol. 119, no. 162, ICD2019-8, pp. 35-40, Aug. 2019. | |
| Paper # | ICD2019-8 | |
| Date of Issue | 2019-07-31 (SDM, ICD) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | SDM2019-43 ICD2019-8 Link to ES Tech. Rep. Archives: SDM2019-43 ICD2019-8 |
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| Conference Information | |
| Committee | SDM ICD ITE-IST |
| Conference Date | 2019-08-07 - 2019-08-09 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Hokkaido Univ., Graduate School /Faculty of Information Science and |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Analog, Mixed Analog and Digital, RF, and Sensor Interface, Low Voltage/Low Power Techniques, Novel Devices/Circuits, and the Applications |
| Paper Information | |
| Registration To | ICD |
| Conference Code | 2019-08-SDM-ICD-IST |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Low-Noise Low-Power MEMS Accelerometer with Digital Noise-Reduction Techniques |
| Sub Title (in English) | |
| Keyword(1) | Accelerometer |
| Keyword(2) | MEMS |
| Keyword(3) | Low power |
| Keyword(4) | Low noise |
| Keyword(5) | Oil and gas exploration |
| Keyword(6) | Infrastructure monitoring |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Yuki Furubayashi |
| 1st Author's Affiliation | Hitachi, Ltd. (Hitachi, Ltd.) |
| 2nd Author's Name | Takashi Oshima |
| 2nd Author's Affiliation | Hitachi, Ltd. (Hitachi, Ltd.) |
| 3rd Author's Name | Yudai Kamada |
| 3rd Author's Affiliation | Hitachi, Ltd. (Hitachi, Ltd.) |
| 4th Author's Name | Atsushi Isobe |
| 4th Author's Affiliation | Hitachi, Ltd. (Hitachi, Ltd.) |
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| Speaker | Author-1 |
| Date Time | 2019-08-08 11:00:00 |
| Presentation Time | 45 minutes |
| Registration for | ICD |
| Paper # | SDM2019-43, ICD2019-8 |
| Volume (vol) | vol.119 |
| Number (no) | no.161(SDM), no.162(ICD) |
| Page | pp.35-40 |
| #Pages | 6 |
| Date of Issue | 2019-07-31 (SDM, ICD) |
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