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Paper Abstract and Keywords
Presentation 2019-08-02 14:40
[Invited Lecture] Development of G6 Exposure Tool for 1.2 μm Resolution
Kouhei Nagano, Nobuhiko Yabu, Manabu Hakko, Miwako Ando, Nozomu Izumi, Yoshinori Osaki (Canon)
Abstract (in Japanese) (See Japanese page) 
(in English) (Not available yet)
Keyword (in Japanese) (See Japanese page) 
(in English) / / / / / / /  
Reference Info. IEICE Tech. Rep.
Paper #  
Date of Issue  
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380

Conference Information
Committee ITE-IDY EID SID-JC  
Conference Date 2019-08-02 - 2019-08-02 
Place (in Japanese) (See Japanese page) 
Place (in English) Kikai-Shinko-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Information Display 
Paper Information
Registration To ITE-IDY 
Conference Code 2019-08-IDY-EID-JC 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Development of G6 Exposure Tool for 1.2 μm Resolution 
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1st Author's Name Kouhei Nagano  
1st Author's Affiliation Canon Inc. (Canon)
2nd Author's Name Nobuhiko Yabu  
2nd Author's Affiliation Canon Inc. (Canon)
3rd Author's Name Manabu Hakko  
3rd Author's Affiliation Canon Inc. (Canon)
4th Author's Name Miwako Ando  
4th Author's Affiliation Canon Inc. (Canon)
5th Author's Name Nozomu Izumi  
5th Author's Affiliation Canon Inc. (Canon)
6th Author's Name Yoshinori Osaki  
6th Author's Affiliation Canon Inc. (Canon)
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Speaker
Date Time 2019-08-02 14:40:00 
Presentation Time 25 
Registration for ITE-IDY 
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