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Paper Abstract and Keywords
Presentation 2019-06-21 13:30
[Invited Lecture] Necessity of 2D/3D nano metrology from the point of semiconductor devices
Koji Usuda (Toshiba Memory Co.) SDM2019-29 Link to ES Tech. Rep. Archives: SDM2019-29
Abstract (in Japanese) (See Japanese page) 
(in English) (Not available yet)
Keyword (in Japanese) (See Japanese page) 
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Reference Info. IEICE Tech. Rep., vol. 119, no. 96, SDM2019-29, pp. 21-21, June 2019.
Paper # SDM2019-29 
Date of Issue 2019-06-14 (SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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reproduction
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF SDM2019-29 Link to ES Tech. Rep. Archives: SDM2019-29

Conference Information
Committee SDM  
Conference Date 2019-06-21 - 2019-06-21 
Place (in Japanese) (See Japanese page) 
Place (in English) Nagoya Univ. VBL3F 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Material Science and Process Technology for MOS Devices and Memories 
Paper Information
Registration To SDM 
Conference Code 2019-06-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Necessity of 2D/3D nano metrology from the point of semiconductor devices 
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1st Author's Name Koji Usuda  
1st Author's Affiliation Toshiba Memory Corporation (Toshiba Memory Co.)
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Date Time 2019-06-21 13:30:00 
Presentation Time 30 minutes 
Registration for SDM 
Paper # SDM2019-29 
Volume (vol) vol.119 
Number (no) no.96 
Page p.21 
#Pages
Date of Issue 2019-06-14 (SDM) 


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