Paper Abstract and Keywords |
Presentation |
2019-06-21 12:00
Mechanism of strain relaxation enhancement by ion implantation method for group-IV semiconductor alloy thin film Hidetaka Sofue, Masahiro Fukuda, Shigehisa Shibayama (Nagoya Univ.), Shigeaki Zaima (Meijo Univ.), Osamu Nakatsuka, (Nagoya Univ.) SDM2019-28 Link to ES Tech. Rep. Archives: SDM2019-28 |
Abstract |
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Reference Info. |
IEICE Tech. Rep., vol. 119, no. 96, SDM2019-28, pp. 17-20, June 2019. |
Paper # |
SDM2019-28 |
Date of Issue |
2019-06-14 (SDM) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
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SDM2019-28 Link to ES Tech. Rep. Archives: SDM2019-28 |
Conference Information |
Committee |
SDM |
Conference Date |
2019-06-21 - 2019-06-21 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Nagoya Univ. VBL3F |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Material Science and Process Technology for MOS Devices and Memories |
Paper Information |
Registration To |
SDM |
Conference Code |
2019-06-SDM |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
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Title (in English) |
Mechanism of strain relaxation enhancement by ion implantation method for group-IV semiconductor alloy thin film |
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1st Author's Name |
Hidetaka Sofue |
1st Author's Affiliation |
Nagoya University (Nagoya Univ.) |
2nd Author's Name |
Masahiro Fukuda |
2nd Author's Affiliation |
Nagoya University (Nagoya Univ.) |
3rd Author's Name |
Shigehisa Shibayama |
3rd Author's Affiliation |
Nagoya University (Nagoya Univ.) |
4th Author's Name |
Shigeaki Zaima |
4th Author's Affiliation |
Meijo University (Meijo Univ.) |
5th Author's Name |
Osamu Nakatsuka, |
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Nagoya University (Nagoya Univ.) |
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Speaker |
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Date Time |
2019-06-21 12:00:00 |
Presentation Time |
20 minutes |
Registration for |
SDM |
Paper # |
SDM2019-28 |
Volume (vol) |
vol.119 |
Number (no) |
no.96 |
Page |
pp.17-20 |
#Pages |
4 |
Date of Issue |
2019-06-14 (SDM) |
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