Paper Abstract and Keywords |
Presentation |
2019-05-17 12:00
Study of Fabrication Process for Nitride-based Semiconductor Integrated Circuits
-- Threshold voltage control by Si-ion implantation -- Hiroshi Okada, Taichi Yokoyama, Kiyomasa Miwa, Keisuke Yamane, Akihiro Wakahara, Hiroto Sekiguchi (Toyohashi Tech.) ED2019-26 CPM2019-17 SDM2019-24 Link to ES Tech. Rep. Archives: ED2019-26 CPM2019-17 SDM2019-24 |
Abstract |
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Reference Info. |
IEICE Tech. Rep., vol. 119, no. 36, SDM2019-24, pp. 77-80, May 2019. |
Paper # |
SDM2019-24 |
Date of Issue |
2019-05-09 (ED, CPM, SDM) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
ED2019-26 CPM2019-17 SDM2019-24 Link to ES Tech. Rep. Archives: ED2019-26 CPM2019-17 SDM2019-24 |
Conference Information |
Committee |
SDM ED CPM |
Conference Date |
2019-05-16 - 2019-05-17 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Shizuoka Univ. (Hamamatsu) |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Materials, Fabrication, and Characterization of Functional Devices, and Related Technology |
Paper Information |
Registration To |
SDM |
Conference Code |
2019-05-SDM-ED-CPM |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Study of Fabrication Process for Nitride-based Semiconductor Integrated Circuits |
Sub Title (in English) |
Threshold voltage control by Si-ion implantation |
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1st Author's Name |
Hiroshi Okada |
1st Author's Affiliation |
Toyohashi University of Technology (Toyohashi Tech.) |
2nd Author's Name |
Taichi Yokoyama |
2nd Author's Affiliation |
Toyohashi University of Technology (Toyohashi Tech.) |
3rd Author's Name |
Kiyomasa Miwa |
3rd Author's Affiliation |
Toyohashi University of Technology (Toyohashi Tech.) |
4th Author's Name |
Keisuke Yamane |
4th Author's Affiliation |
Toyohashi University of Technology (Toyohashi Tech.) |
5th Author's Name |
Akihiro Wakahara |
5th Author's Affiliation |
Toyohashi University of Technology (Toyohashi Tech.) |
6th Author's Name |
Hiroto Sekiguchi |
6th Author's Affiliation |
Toyohashi University of Technology (Toyohashi Tech.) |
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Speaker |
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Date Time |
2019-05-17 12:00:00 |
Presentation Time |
25 minutes |
Registration for |
SDM |
Paper # |
ED2019-26, CPM2019-17, SDM2019-24 |
Volume (vol) |
vol.119 |
Number (no) |
no.34(ED), no.35(CPM), no.36(SDM) |
Page |
pp.77-80 |
#Pages |
4 |
Date of Issue |
2019-05-09 (ED, CPM, SDM) |
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