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Paper Abstract and Keywords
Presentation 2019-04-18 13:25
Characteristic evaluation of ZnO thin film deposit by room temperature ALD
Kazuki Yoshida, Kentaro Saito, Masanori Miura, Kensaku Kanomata, Fumihiko Hirose (Yamagata Univ.) ED2019-2
Abstract (in Japanese) (See Japanese page) 
(in English) (Available after conference date)
Keyword (in Japanese) (See Japanese page) 
(in English) atomic layer deposition / plasma excited humidified argon / zinc oxide / ellipsometry / Tauc- Lorentz / / /  
Reference Info. IEICE Tech. Rep., vol. 119, no. 9, ED2019-2, pp. 5-8, April 2019.
Paper # ED2019-2 
Date of Issue 2019-04-11 (ED) 
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380
Copyright
and
reproduction
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (No. 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2019-2

Conference Information
Committee ED  
Conference Date 2019-04-18 - 2019-04-18 
Place (in Japanese) (See Japanese page) 
Place (in English) RIEC, Tohoku Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Organic devices, oxide devices, general 
Paper Information
Registration To ED 
Conference Code 2019-04-ED 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Characteristic evaluation of ZnO thin film deposit by room temperature ALD 
Sub Title (in English)  
Keyword(1) atomic layer deposition  
Keyword(2) plasma excited humidified argon  
Keyword(3) zinc oxide  
Keyword(4) ellipsometry  
Keyword(5) Tauc- Lorentz  
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Keyword(7)  
Keyword(8)  
1st Author's Name Kazuki Yoshida  
1st Author's Affiliation Yamagata University (Yamagata Univ.)
2nd Author's Name Kentaro Saito  
2nd Author's Affiliation Yamagata University (Yamagata Univ.)
3rd Author's Name Masanori Miura  
3rd Author's Affiliation Yamagata University (Yamagata Univ.)
4th Author's Name Kensaku Kanomata  
4th Author's Affiliation Yamagata University (Yamagata Univ.)
5th Author's Name Fumihiko Hirose  
5th Author's Affiliation Yamagata University (Yamagata Univ.)
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Speaker
Date Time 2019-04-18 13:25:00 
Presentation Time 25 
Registration for ED 
Paper # IEICE-ED2019-2 
Volume (vol) IEICE-119 
Number (no) no.9 
Page pp.5-8 
#Pages IEICE-4 
Date of Issue IEICE-ED-2019-04-11 


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