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Paper Abstract and Keywords
Presentation 2019-04-18 13:00
Fabrication of yttria insulating films by low-temperature yttria atomic layer deposition
Kentaro Saito, Kazuki Yosida, Kensaku Kanomata, Masanori Miura, Bashir Ahmmad Arima, Shigeru Kubota, Fumihiko Hirose (Yamagata Univ.)   エレソ技報アーカイブはこちら
Abstract (in Japanese) (See Japanese page) 
(in English) (Available after conference date)
Keyword (in Japanese) (See Japanese page) 
(in English) / / / / / / /  
Reference Info. IEICE Tech. Rep., vol. 119, no. 9, ED2019-1, pp. 1-4, April 2019.
Paper # ED2019-1 
Date of Issue 2019-04-11 (ED) 
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380

Conference Information
Committee ED  
Conference Date 2019-04-18 - 2019-04-18 
Place (in Japanese) (See Japanese page) 
Place (in English) RIEC, Tohoku Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Organic devices, oxide devices, general 
Paper Information
Registration To ED 
Conference Code 2019-04-ED 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Fabrication of yttria insulating films by low-temperature yttria atomic layer deposition 
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1st Author's Name Kentaro Saito  
1st Author's Affiliation Yamagata University (Yamagata Univ.)
2nd Author's Name Kazuki Yosida  
2nd Author's Affiliation Yamagata University (Yamagata Univ.)
3rd Author's Name Kensaku Kanomata  
3rd Author's Affiliation Yamagata University (Yamagata Univ.)
4th Author's Name Masanori Miura  
4th Author's Affiliation Yamagata University (Yamagata Univ.)
5th Author's Name Bashir Ahmmad Arima  
5th Author's Affiliation Yamagata University (Yamagata Univ.)
6th Author's Name Shigeru Kubota  
6th Author's Affiliation Yamagata University (Yamagata Univ.)
7th Author's Name Fumihiko Hirose  
7th Author's Affiliation Yamagata University (Yamagata Univ.)
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Speaker
Date Time 2019-04-18 13:00:00 
Presentation Time 25 
Registration for ED 
Paper # IEICE-ED2019-1 
Volume (vol) IEICE-119 
Number (no) no.9 
Page pp.1-4 
#Pages IEICE-4 
Date of Issue IEICE-ED-2019-04-11 


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