Paper Abstract and Keywords |
Presentation |
2018-12-06 17:10
Examination of Chip-on-Wafer Plasma Activated Bonding Technology for III-V on Si hybrid Photonic Integrated Circuits LIU BAI (Tokyo Tech), Takehiko Kikuchi (SEI), Takuya Mitarai, Nobuhiko Nishiyama (Tokyo Tech), Hideki Yagi (SEI), Tomohiro Amemiya, Shigehisa Arai (Tokyo Tech) OPE2018-127 LQE2018-137 SIPH2018-43 Link to ES Tech. Rep. Archives: OPE2018-127 LQE2018-137 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
(Not available yet) |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Hybrid / Photonic Integrated Circuits / Chip-on-Wafer / Plasma Activated Bonding / photoluminescence / stress / / |
Reference Info. |
IEICE Tech. Rep., vol. 118, no. 348, OPE2018-127, pp. 149-153, Dec. 2018. |
Paper # |
OPE2018-127 |
Date of Issue |
2018-11-29 (OPE, LQE) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
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Download PDF |
OPE2018-127 LQE2018-137 SIPH2018-43 Link to ES Tech. Rep. Archives: OPE2018-127 LQE2018-137 |
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