| IEICE Technical Committee Submission System Conference Paper's Information |
Online Proceedings [Sign in] Tech. Rep. Archives |
| Go Top Page | Go Previous | [Japanese] / [English] |
| Paper Abstract and Keywords | ||
| Presentation | 2018-12-05 14:40 Improved Routing Method for Two Layer Self-Aligned Double Patterning Shoya Tamura, Kunihiro Fujiyoshi (TUAT)  VLD2018-45 DC2018-31 |
|
| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | Self-Aligned Double Patterning (SADP) enables us to fabricate fine wiring under ArF immersion lithography. However, when multi-layer routing is performed, vias have to be greatly thickened because techniques for manufacturing fine vias are immature. Therefore, we extended the channel routing method which can wire efficiently on the basis of the VH routing, and proposed a two-layer routing method corresponding to a significantly thick vias. In this method, x-coordinate of each via is determined by using the constraint graph so that the whole routing can be succeeded with a higher probability. We implemented the proposed method on a computer and confirmed its effectiveness. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Self-Aligned Double Patterning / VH Routing / Channel Routing / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 118, no. 334, VLD2018-45, pp. 37-42, Dec. 2018. | |
| Paper # | VLD2018-45 | |
| Date of Issue | 2018-11-28 (VLD, DC) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | VLD2018-45 DC2018-31 |
|
| Conference Information | |
| Committee | VLD DC CPSY RECONF CPM ICD IE IPSJ-SLDM |
| Conference Date | 2018-12-05 - 2018-12-07 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Satellite Campus Hiroshima |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Design Gaia 2018 -New Field of VLSI Design- |
| Paper Information | |
| Registration To | VLD |
| Conference Code | 2018-12-VLD-DC-CPSY-RECONF-CPM-ICD-IE-SLDM-EMB-ARC |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Improved Routing Method for Two Layer Self-Aligned Double Patterning |
| Sub Title (in English) | |
| Keyword(1) | Self-Aligned Double Patterning |
| Keyword(2) | VH Routing |
| Keyword(3) | Channel Routing |
| Keyword(4) | |
| Keyword(5) | |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Shoya Tamura |
| 1st Author's Affiliation | Tokyo University of Agriculture and Technology (TUAT) |
| 2nd Author's Name | Kunihiro Fujiyoshi |
| 2nd Author's Affiliation | Tokyo University of Agriculture and Technology (TUAT) |
| 3rd Author's Name | |
| 3rd Author's Affiliation | () |
| 4th Author's Name | |
| 4th Author's Affiliation | () |
| 5th Author's Name | |
| 5th Author's Affiliation | () |
| 6th Author's Name | |
| 6th Author's Affiliation | () |
| 7th Author's Name | |
| 7th Author's Affiliation | () |
| 8th Author's Name | |
| 8th Author's Affiliation | () |
| 9th Author's Name | |
| 9th Author's Affiliation | () |
| 10th Author's Name | |
| 10th Author's Affiliation | () |
| 11th Author's Name | |
| 11th Author's Affiliation | () |
| 12th Author's Name | |
| 12th Author's Affiliation | () |
| 13th Author's Name | |
| 13th Author's Affiliation | () |
| 14th Author's Name | |
| 14th Author's Affiliation | () |
| 15th Author's Name | |
| 15th Author's Affiliation | () |
| 16th Author's Name | |
| 16th Author's Affiliation | () |
| 17th Author's Name | |
| 17th Author's Affiliation | () |
| 18th Author's Name | |
| 18th Author's Affiliation | () |
| Speaker | Author-1 |
| Date Time | 2018-12-05 14:40:00 |
| Presentation Time | 25 minutes |
| Registration for | VLD |
| Paper # | VLD2018-45, DC2018-31 |
| Volume (vol) | vol.118 |
| Number (no) | no.334(VLD), no.335(DC) |
| Page | pp.37-42 |
| #Pages | 6 |
| Date of Issue | 2018-11-28 (VLD, DC) |
[Return to Top Page]