Paper Abstract and Keywords |
Presentation |
2018-11-01 13:25
Effect on nitrogen doping to ZnO films of nitrogen radical supply generated on Ir catalyst surface Taro Saito, Yuki Adachi, Ryuta Iba, Shotaro Ono (Nagaoka Univ. of Tech.), Koichiro Oishi, Hironori Katagiri (Nat. Inst. Tech., Nagaoka Coll.), Kanji Yasui (Nagaoka Univ. of Tech.) CPM2018-42 Link to ES Tech. Rep. Archives: CPM2018-42 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
The large bandgap and large exciton binding energy of ZnO have recently stimulated intensive research into optoelectronic device applications, such as light-emitting diodes and laser diodes in the ultraviolet region. We previously developed a new chemical vapor deposition method for ZnO film growth using a catalytic reaction over Pt-nanoparticles between hydrogen and oxygen. ZnO films grown on a-plane sapphire substrates using this method exhibited excellent optical and electronic properties. In order to fabricate ZnO-based light-emitting diodes and laser diodes, preparation of p-type ZnO films is required. In the present study, we have attempted nitrogen doping of ZnO films by decomposition of NO gas using a heated Ir wire during film growth. In X-ray photoelectron spectra, multiple overlapping N-1s peaks were observed from 395 to 406 eV. By deconvolving the spectra, components such as Zn-N, N-N, N-H, and NOx were identified. The relative intensity of the Zn-N peak at 395.5–361.1 eV increased when the heated Ir wire was used to decompose the NO gas. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
catalytic reaction / high-temperature H2O beam / Ir hot-wire / nitrogen doping / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 118, no. 276, CPM2018-42, pp. 5-9, Nov. 2018. |
Paper # |
CPM2018-42 |
Date of Issue |
2018-10-25 (CPM) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
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CPM2018-42 Link to ES Tech. Rep. Archives: CPM2018-42 |
Conference Information |
Committee |
CPM IEE-MAG |
Conference Date |
2018-11-01 - 2018-11-02 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Machinaka campus Nagaoka |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Functional materials (semiconductors, magnetic materials, dielectric materials, transparent conductors, semiconductors, etc.) Thin film processes / materials / devices, etc. |
Paper Information |
Registration To |
CPM |
Conference Code |
2018-11-CPM-MAG |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Effect on nitrogen doping to ZnO films of nitrogen radical supply generated on Ir catalyst surface |
Sub Title (in English) |
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Keyword(1) |
catalytic reaction |
Keyword(2) |
high-temperature H2O beam |
Keyword(3) |
Ir hot-wire |
Keyword(4) |
nitrogen doping |
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1st Author's Name |
Taro Saito |
1st Author's Affiliation |
Nagaoka University of Technology (Nagaoka Univ. of Tech.) |
2nd Author's Name |
Yuki Adachi |
2nd Author's Affiliation |
Nagaoka University of Technology (Nagaoka Univ. of Tech.) |
3rd Author's Name |
Ryuta Iba |
3rd Author's Affiliation |
Nagaoka University of Technology (Nagaoka Univ. of Tech.) |
4th Author's Name |
Shotaro Ono |
4th Author's Affiliation |
Nagaoka University of Technology (Nagaoka Univ. of Tech.) |
5th Author's Name |
Koichiro Oishi |
5th Author's Affiliation |
National Institute of Technology, Nagaoka College (Nat. Inst. Tech., Nagaoka Coll.) |
6th Author's Name |
Hironori Katagiri |
6th Author's Affiliation |
National Institute of Technology, Nagaoka College (Nat. Inst. Tech., Nagaoka Coll.) |
7th Author's Name |
Kanji Yasui |
7th Author's Affiliation |
Nagaoka University of Technology (Nagaoka Univ. of Tech.) |
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Speaker |
Author-1 |
Date Time |
2018-11-01 13:25:00 |
Presentation Time |
25 minutes |
Registration for |
CPM |
Paper # |
CPM2018-42 |
Volume (vol) |
vol.118 |
Number (no) |
no.276 |
Page |
pp.5-9 |
#Pages |
5 |
Date of Issue |
2018-10-25 (CPM) |
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