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Paper Abstract and Keywords
Presentation 2018-11-01 13:25
Effect on nitrogen doping to ZnO films of nitrogen radical supply generated on Ir catalyst surface
Taro Saito, Yuki Adachi, Ryuta Iba, Shotaro Ono (Nagaoka Univ. of Tech.), Koichiro Oishi, Hironori Katagiri (Nat. Inst. Tech., Nagaoka Coll.), Kanji Yasui (Nagaoka Univ. of Tech.) CPM2018-42 Link to ES Tech. Rep. Archives: CPM2018-42
Abstract (in Japanese) (See Japanese page) 
(in English) The large bandgap and large exciton binding energy of ZnO have recently stimulated intensive research into optoelectronic device applications, such as light-emitting diodes and laser diodes in the ultraviolet region. We previously developed a new chemical vapor deposition method for ZnO film growth using a catalytic reaction over Pt-nanoparticles between hydrogen and oxygen. ZnO films grown on a-plane sapphire substrates using this method exhibited excellent optical and electronic properties. In order to fabricate ZnO-based light-emitting diodes and laser diodes, preparation of p-type ZnO films is required. In the present study, we have attempted nitrogen doping of ZnO films by decomposition of NO gas using a heated Ir wire during film growth. In X-ray photoelectron spectra, multiple overlapping N-1s peaks were observed from 395 to 406 eV. By deconvolving the spectra, components such as Zn-N, N-N, N-H, and NOx were identified. The relative intensity of the Zn-N peak at 395.5–361.1 eV increased when the heated Ir wire was used to decompose the NO gas.
Keyword (in Japanese) (See Japanese page) 
(in English) catalytic reaction / high-temperature H2O beam / Ir hot-wire / nitrogen doping / / / /  
Reference Info. IEICE Tech. Rep., vol. 118, no. 276, CPM2018-42, pp. 5-9, Nov. 2018.
Paper # CPM2018-42 
Date of Issue 2018-10-25 (CPM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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Download PDF CPM2018-42 Link to ES Tech. Rep. Archives: CPM2018-42

Conference Information
Committee CPM IEE-MAG  
Conference Date 2018-11-01 - 2018-11-02 
Place (in Japanese) (See Japanese page) 
Place (in English) Machinaka campus Nagaoka 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Functional materials (semiconductors, magnetic materials, dielectric materials, transparent conductors, semiconductors, etc.) Thin film processes / materials / devices, etc. 
Paper Information
Registration To CPM 
Conference Code 2018-11-CPM-MAG 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Effect on nitrogen doping to ZnO films of nitrogen radical supply generated on Ir catalyst surface 
Sub Title (in English)  
Keyword(1) catalytic reaction  
Keyword(2) high-temperature H2O beam  
Keyword(3) Ir hot-wire  
Keyword(4) nitrogen doping  
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1st Author's Name Taro Saito  
1st Author's Affiliation Nagaoka University of Technology (Nagaoka Univ. of Tech.)
2nd Author's Name Yuki Adachi  
2nd Author's Affiliation Nagaoka University of Technology (Nagaoka Univ. of Tech.)
3rd Author's Name Ryuta Iba  
3rd Author's Affiliation Nagaoka University of Technology (Nagaoka Univ. of Tech.)
4th Author's Name Shotaro Ono  
4th Author's Affiliation Nagaoka University of Technology (Nagaoka Univ. of Tech.)
5th Author's Name Koichiro Oishi  
5th Author's Affiliation National Institute of Technology, Nagaoka College (Nat. Inst. Tech., Nagaoka Coll.)
6th Author's Name Hironori Katagiri  
6th Author's Affiliation National Institute of Technology, Nagaoka College (Nat. Inst. Tech., Nagaoka Coll.)
7th Author's Name Kanji Yasui  
7th Author's Affiliation Nagaoka University of Technology (Nagaoka Univ. of Tech.)
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Speaker Author-1 
Date Time 2018-11-01 13:25:00 
Presentation Time 25 minutes 
Registration for CPM 
Paper # CPM2018-42 
Volume (vol) vol.118 
Number (no) no.276 
Page pp.5-9 
#Pages
Date of Issue 2018-10-25 (CPM) 


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