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Paper Abstract and Keywords
Presentation 2018-10-04 13:30
The influence of negative ions generation on various ScAl alloy sputtering targets to ScAlN film properties -- Comparison of EB-melted, arc-melted and hot press sintered ScAl alloy targets --
Rei Karasawa (Waseda Univ.), Shinji Takayanagi (Nagoya Inst. Tech.), Yuka Endo (Waseda Univ.), Makoto Imasaka, Keisuke Morisaka, Yu Suzuki (Furuya Metal Co., Ltd.), Takahiko Yanagitani (Waseda Univ.) US2018-55
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Reference Info. IEICE Tech. Rep., vol. 118, no. 229, US2018-55, pp. 37-42, Oct. 2018.
Paper # US2018-55 
Date of Issue 2018-09-27 (US) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee US  
Conference Date 2018-10-04 - 2018-10-04 
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Paper Information
Registration To US 
Conference Code 2018-10-US 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) The influence of negative ions generation on various ScAl alloy sputtering targets to ScAlN film properties 
Sub Title (in English) Comparison of EB-melted, arc-melted and hot press sintered ScAl alloy targets 
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1st Author's Name Rei Karasawa  
1st Author's Affiliation Waseda University (Waseda Univ.)
2nd Author's Name Shinji Takayanagi  
2nd Author's Affiliation Nagoya Institute of Technology (Nagoya Inst. Tech.)
3rd Author's Name Yuka Endo  
3rd Author's Affiliation Waseda University (Waseda Univ.)
4th Author's Name Makoto Imasaka  
4th Author's Affiliation Furuya Metal Co., Ltd. (Furuya Metal Co., Ltd.)
5th Author's Name Keisuke Morisaka  
5th Author's Affiliation Furuya Metal Co., Ltd. (Furuya Metal Co., Ltd.)
6th Author's Name Yu Suzuki  
6th Author's Affiliation Furuya Metal Co., Ltd. (Furuya Metal Co., Ltd.)
7th Author's Name Takahiko Yanagitani  
7th Author's Affiliation Waseda University (Waseda Univ.)
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Date Time 2018-10-04 13:30:00 
Presentation Time 25 minutes 
Registration for US 
Paper # US2018-55 
Volume (vol) vol.118 
Number (no) no.229 
Page pp.37-42 
#Pages
Date of Issue 2018-09-27 (US) 


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