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Paper Abstract and Keywords
Presentation 2018-10-04 11:15
Comparison between new kt2 extraction method and conventional methods for film/substrate structure -- Resonant frequency ratio method, conversion loss method, resonant spectrum method, and resonance antiresonance method --
Makoto Totsuka, Takahiko Yanagitani (Waseda Univ.) US2018-52
Abstract (in Japanese) (See Japanese page) 
(in English) The electromechanical coupling coefficient kt2 is an important parameter for determining the performances of the RF piezoelectric devices. A resonance antiresonance method is recommended for the determination of kt2 for the piezoelectric film, according to the IEEE standard. However, a self-standing film structure (FBAR) is required to use this method. It is convenient to estimate the kt2 of piezoelectric film in film/substrate structure (HBAR) before preparing piezoelectric devices. In this study, we proposed the kt2 determination method by using the ratio of a third mode resonant frequency to a fundamental mode resonant frequency in HBAR. We compared this method with conventional methods to demonstrate the validity of this method. The difference between kt2 determined by this method and one by the resonance antiresonance method is within 7%.
Keyword (in Japanese) (See Japanese page) 
(in English) Electromechanical coupling coefficient / HBAR / Piezoelectric film / Resonant frequency / / / /  
Reference Info. IEICE Tech. Rep., vol. 118, no. 229, US2018-52, pp. 19-24, Oct. 2018.
Paper # US2018-52 
Date of Issue 2018-09-27 (US) 
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380
Copyright
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reproduction
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee US  
Conference Date 2018-10-04 - 2018-10-04 
Place (in Japanese) (See Japanese page) 
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Paper Information
Registration To US 
Conference Code 2018-10-US 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Comparison between new kt2 extraction method and conventional methods for film/substrate structure 
Sub Title (in English) Resonant frequency ratio method, conversion loss method, resonant spectrum method, and resonance antiresonance method 
Keyword(1) Electromechanical coupling coefficient  
Keyword(2) HBAR  
Keyword(3) Piezoelectric film  
Keyword(4) Resonant frequency  
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1st Author's Name Makoto Totsuka  
1st Author's Affiliation Waseda Univesity (Waseda Univ.)
2nd Author's Name Takahiko Yanagitani  
2nd Author's Affiliation Waseda Univesity (Waseda Univ.)
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Speaker
Date Time 2018-10-04 11:15:00 
Presentation Time 25 
Registration for US 
Paper # IEICE-US2018-52 
Volume (vol) IEICE-118 
Number (no) no.229 
Page pp.19-24 
#Pages IEICE-6 
Date of Issue IEICE-US-2018-09-27 


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