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Paper Abstract and Keywords
Presentation 2018-06-25 14:30
[Invited Lecture] Recent progress and problem of Diamond device: Crystal quality of bulk and surface
Yukako Kato (AIST), Kouhei Takizawa (Tokyo City Univ.), Toshiharu Makino, Hiromitsu Kato, Masahiko Ogura, Daisuke Takeuchi, Satoshi Yamasaki (AIST), Hiroshi Nohira (Tokyo City Univ.)
Abstract (in Japanese) (See Japanese page) 
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Conference Information
Committee SDM  
Conference Date 2018-06-25 - 2018-06-25 
Place (in Japanese) (See Japanese page) 
Place (in English) Nagoya Univ. VBL3F 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Material Science and Process Technology for MOS Devices and Memories 
Paper Information
Registration To SDM 
Conference Code 2018-06-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Recent progress and problem of Diamond device: Crystal quality of bulk and surface 
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1st Author's Name Yukako Kato  
1st Author's Affiliation National Institute of Advance industrial science and technology (AIST)
2nd Author's Name Kouhei Takizawa  
2nd Author's Affiliation Tokyo City University (Tokyo City Univ.)
3rd Author's Name Toshiharu Makino  
3rd Author's Affiliation National Institute of Advance industrial science and technology (AIST)
4th Author's Name Hiromitsu Kato  
4th Author's Affiliation National Institute of Advance industrial science and technology (AIST)
5th Author's Name Masahiko Ogura  
5th Author's Affiliation National Institute of Advance industrial science and technology (AIST)
6th Author's Name Daisuke Takeuchi  
6th Author's Affiliation National Institute of Advance industrial science and technology (AIST)
7th Author's Name Satoshi Yamasaki  
7th Author's Affiliation National Institute of Advance industrial science and technology (AIST)
8th Author's Name Hiroshi Nohira  
8th Author's Affiliation Tokyo City University (Tokyo City Univ.)
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Speaker Author-1 
Date Time 2018-06-25 14:30:00 
Presentation Time 30 minutes 
Registration for SDM 
Paper #  
Volume (vol) vol.118 
Number (no) no.110 
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