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| Presentation | 2018-02-08 11:25 [Invited Talk] Moisture Barrier Properties of Capping Graphene for Copper Metallization Kazuyoshi Ueno, Ploybussara Gomasang, Takumi Abe (SIT), Kenji Kawahara (Kyushu Univ.), Yoko Wasai (Horiba Techno), Nguyen Thanh Cuong (NIMS), Nataliya Nabatova-Gabain (Horiba Techno), Hiroki Ago (Kyushu Univ.), Susumu Okada (Univ. Tsukuba)  SDM2017-98 Link to ES Tech. Rep. Archives: SDM2017-98 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | (Not available yet) | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | / / / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 117, no. 429, SDM2017-98, pp. 5-9, Feb. 2018. | |
| Paper # | SDM2017-98 | |
| Date of Issue | 2018-02-01 (SDM) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | SDM2017-98 Link to ES Tech. Rep. Archives: SDM2017-98 |
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| Conference Information | |
| Committee | SDM |
| Conference Date | 2018-02-08 - 2018-02-08 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Tokyo Univ. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Paper Information | |
| Registration To | SDM |
| Conference Code | 2018-02-SDM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Moisture Barrier Properties of Capping Graphene for Copper Metallization |
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| 1st Author's Name | Kazuyoshi Ueno |
| 1st Author's Affiliation | Shibaura Institute of Technology (SIT) |
| 2nd Author's Name | Ploybussara Gomasang |
| 2nd Author's Affiliation | Shibaura Institute of Technology (SIT) |
| 3rd Author's Name | Takumi Abe |
| 3rd Author's Affiliation | Shibaura Institute of Technology (SIT) |
| 4th Author's Name | Kenji Kawahara |
| 4th Author's Affiliation | Kyushu University (Kyushu Univ.) |
| 5th Author's Name | Yoko Wasai |
| 5th Author's Affiliation | Horiba TechnoService Co. Ltd. (Horiba Techno) |
| 6th Author's Name | Nguyen Thanh Cuong |
| 6th Author's Affiliation | National Institute for Materials Science (NIMS) |
| 7th Author's Name | Nataliya Nabatova-Gabain |
| 7th Author's Affiliation | Horiba Techno Service Co. Ltd. (Horiba Techno) |
| 8th Author's Name | Hiroki Ago |
| 8th Author's Affiliation | Kyushu University (Kyushu Univ.) |
| 9th Author's Name | Susumu Okada |
| 9th Author's Affiliation | University of Tsukuba (Univ. Tsukuba) |
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| Speaker | Author-1 |
| Date Time | 2018-02-08 11:25:00 |
| Presentation Time | 40 minutes |
| Registration for | SDM |
| Paper # | SDM2017-98 |
| Volume (vol) | vol.117 |
| Number (no) | no.429 |
| Page | pp.5-9 |
| #Pages | 5 |
| Date of Issue | 2018-02-01 (SDM) |
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