| IEICE Technical Committee Submission System Conference Paper's Information |
Online Proceedings [Sign in] Tech. Rep. Archives |
| Go Top Page | Go Previous | [Japanese] / [English] |
| Paper Abstract and Keywords | ||
| Presentation | 2018-01-30 15:30 [Invited Talk] Sub-nm EOT Ferroelectric HfO2 on p+Ge with Highly Reliable Field Cycling Properties Xuan Tian, Lun Xu, Shigehisa Shibayama, Tomonori Nishimura, Takeaki Yajima (Univ. of Tokyo), Shinji Migita (AIST), Akira Toriumi (Univ. of Tokyo)  SDM2017-96 Link to ES Tech. Rep. Archives: SDM2017-96 |
|
| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | 5-nm-thick ferroelectric Y-doped HfO2 was intensively studied. The thickness dependence of ferroelectric properties indicates that stable ferroelectric characteristics are maintained down to 5-nm-thick by taking care of doping and capping effects. Furthermore, the cycling performance shows no wake-up behavior, no obvious degradation after 10^8 cycles. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Ferroelectric HfO2 / thickness dependence / field cycling reliability / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 117, no. 427, SDM2017-96, pp. 21-24, Jan. 2018. | |
| Paper # | SDM2017-96 | |
| Date of Issue | 2018-01-23 (SDM) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | SDM2017-96 Link to ES Tech. Rep. Archives: SDM2017-96 |
|
| Conference Information | |
| Committee | SDM |
| Conference Date | 2018-01-30 - 2018-01-30 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Paper Information | |
| Registration To | SDM |
| Conference Code | 2018-01-SDM |
| Language | English |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Sub-nm EOT Ferroelectric HfO2 on p+Ge with Highly Reliable Field Cycling Properties |
| Sub Title (in English) | |
| Keyword(1) | Ferroelectric HfO2 |
| Keyword(2) | thickness dependence |
| Keyword(3) | field cycling reliability |
| Keyword(4) | |
| Keyword(5) | |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Xuan Tian |
| 1st Author's Affiliation | University of Tokyo (Univ. of Tokyo) |
| 2nd Author's Name | Lun Xu |
| 2nd Author's Affiliation | University of Tokyo (Univ. of Tokyo) |
| 3rd Author's Name | Shigehisa Shibayama |
| 3rd Author's Affiliation | University of Tokyo (Univ. of Tokyo) |
| 4th Author's Name | Tomonori Nishimura |
| 4th Author's Affiliation | University of Tokyo (Univ. of Tokyo) |
| 5th Author's Name | Takeaki Yajima |
| 5th Author's Affiliation | University of Tokyo (Univ. of Tokyo) |
| 6th Author's Name | Shinji Migita |
| 6th Author's Affiliation | National Institute of Advanced Industrial Science and Technology (AIST) |
| 7th Author's Name | Akira Toriumi |
| 7th Author's Affiliation | University of Tokyo (Univ. of Tokyo) |
| 8th Author's Name | |
| 8th Author's Affiliation | () |
| 9th Author's Name | |
| 9th Author's Affiliation | () |
| 10th Author's Name | |
| 10th Author's Affiliation | () |
| 11th Author's Name | |
| 11th Author's Affiliation | () |
| 12th Author's Name | |
| 12th Author's Affiliation | () |
| 13th Author's Name | |
| 13th Author's Affiliation | () |
| 14th Author's Name | |
| 14th Author's Affiliation | () |
| 15th Author's Name | |
| 15th Author's Affiliation | () |
| 16th Author's Name | |
| 16th Author's Affiliation | () |
| 17th Author's Name | |
| 17th Author's Affiliation | () |
| 18th Author's Name | |
| 18th Author's Affiliation | () |
| Speaker | Author-1 |
| Date Time | 2018-01-30 15:30:00 |
| Presentation Time | 30 minutes |
| Registration for | SDM |
| Paper # | SDM2017-96 |
| Volume (vol) | vol.117 |
| Number (no) | no.427 |
| Page | pp.21-24 |
| #Pages | 4 |
| Date of Issue | 2018-01-23 (SDM) |
[Return to Top Page]