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Paper Abstract and Keywords
Presentation 2017-12-22 14:45
Modification effects of ferroelectric thick-film properties on silicon substrates by proton beam irradiation
Jun Hirade, Masaki Yamaguchi (Shibaura Inst. of Tech.), Yoichiro Masuda (Hachinohe Inst. of Tech.) EID2017-22 SDM2017-83 Link to ES Tech. Rep. Archives: EID2017-22 SDM2017-83
Abstract (in Japanese) (See Japanese page) 
(in English) Ferroelectric thin films deposited on silicon substrates are expected to be applied to nonvolatile memories,
photonic crystals, piezoelectric MEMS, and the like. However, when considering piezoelectric application, thick film
patterning problem arises. A proton is an elementary particle having a mass of about 1,800 times that of an electron.
Therefore, it is considered that the scattering inside the substance is less than the electron. Thus, we are proposing a
new processing technology using proton beam. In this report, we investigated the influence of proton irradiation on bismuth
titanate thick film, which is a lead-free ferroelectric material on a silicon substrate. When the proton beam was irradiated on
the crystallized film, it was confirmed that the crystallinity was deteriorated by the increase in irradiation amount from the
measurement result of X-ray diffraction intensity and ferroelectric properties.
Keyword (in Japanese) (See Japanese page) 
(in English) Proton beam / Bi4Ti3O12 / / / / / /  
Reference Info. IEICE Tech. Rep., vol. 117, no. 373, SDM2017-83, pp. 57-62, Dec. 2017.
Paper # SDM2017-83 
Date of Issue 2017-12-15 (EID, SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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Download PDF EID2017-22 SDM2017-83 Link to ES Tech. Rep. Archives: EID2017-22 SDM2017-83

Conference Information
Committee SDM EID  
Conference Date 2017-12-22 - 2017-12-22 
Place (in Japanese) (See Japanese page) 
Place (in English) Kyoto University 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Si, Si-related materials, device process, electron devices, and display technology 
Paper Information
Registration To SDM 
Conference Code 2017-12-SDM-EID 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Modification effects of ferroelectric thick-film properties on silicon substrates by proton beam irradiation 
Sub Title (in English)  
Keyword(1) Proton beam  
Keyword(2) Bi4Ti3O12  
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1st Author's Name Jun Hirade  
1st Author's Affiliation Shibaura Institute of Technology (Shibaura Inst. of Tech.)
2nd Author's Name Masaki Yamaguchi  
2nd Author's Affiliation Shibaura Institute of Technology (Shibaura Inst. of Tech.)
3rd Author's Name Yoichiro Masuda  
3rd Author's Affiliation Hachinohe Institute of Technology (Hachinohe Inst. of Tech.)
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Speaker Author-1 
Date Time 2017-12-22 14:45:00 
Presentation Time 15 minutes 
Registration for SDM 
Paper # EID2017-22, SDM2017-83 
Volume (vol) vol.117 
Number (no) no.372(EID), no.373(SDM) 
Page pp.57-62 
#Pages
Date of Issue 2017-12-15 (EID, SDM) 


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