| IEICE Technical Committee Submission System Conference Paper's Information |
Online Proceedings [Sign in] Tech. Rep. Archives |
| Go Top Page | Go Previous | [Japanese] / [English] |
| Paper Abstract and Keywords | ||
| Presentation | 2017-08-09 13:55 Fabrication and evaluation of MEMS optical interferometric biosensor with high wavelength selectivity Toshiaki Takahashi, Takeshi Hizawa (TUT), Nobuo Misawa (KAST), Miki Taki (TUT), Kazuaki Sawada, Kazuhiro Takahashi (TUT/JST)  ED2017-28 Link to ES Tech. Rep. Archives: ED2017-28 |
|
| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | For detecting unlabeled biomarkers in blood with high sensitivity, we have proposed a biosensor using a MEMS optical interferometer. When the target molecule is adsorbed by the antigen-antibody reaction onto movable membrane which plays a role as a upper mirror of the optical interferometer, the amount of deformation of the movable membrane displaced by the change of surface stress can be detected with high sensitivity. In order to improve the limit of detection of this biosensor, we fabricated and evaluated a high wavelength selective MEMS optical interferometric sensor with metal half-mirrors with high reflectance. The proposed structure employed a 50 nm thick Au half mirror deposited on the mirror surface of the optical interferometer for high wavelength selectivity, and the signal conversion efficiency improved to be 6.6 times. Also, the peak shift on reflection spectrum due to the BSA antigen-antibody reaction was spectroscopically measured on the fabricated optical interferometer, the deformation amount of 7.2 times was obtained at 15 minutes as compared with the deformed amount of the movable membrane in a solution without the BSA antigen. This result indicated the target antigen molecule can be selectively detected. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Fabry-Perot interferometer / Au half-mirror / Antigen Antibody reaction / Biosensor / Wavelength selectivity / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 117, no. 172, ED2017-28, pp. 5-8, Aug. 2017. | |
| Paper # | ED2017-28 | |
| Date of Issue | 2017-08-02 (ED) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | ED2017-28 Link to ES Tech. Rep. Archives: ED2017-28 |
|
| Conference Information | |
| Committee | ED |
| Conference Date | 2017-08-09 - 2017-08-10 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Sensor, MEMS, general |
| Paper Information | |
| Registration To | ED |
| Conference Code | 2017-08-ED |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication and evaluation of MEMS optical interferometric biosensor with high wavelength selectivity |
| Sub Title (in English) | |
| Keyword(1) | Fabry-Perot interferometer |
| Keyword(2) | Au half-mirror |
| Keyword(3) | Antigen Antibody reaction |
| Keyword(4) | Biosensor |
| Keyword(5) | Wavelength selectivity |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Toshiaki Takahashi |
| 1st Author's Affiliation | Toyohashi University of Technology (TUT) |
| 2nd Author's Name | Takeshi Hizawa |
| 2nd Author's Affiliation | Toyohashi University of Technology (TUT) |
| 3rd Author's Name | Nobuo Misawa |
| 3rd Author's Affiliation | Kanagawa Academy of Science and Technology (KAST) |
| 4th Author's Name | Miki Taki |
| 4th Author's Affiliation | Toyohashi University of Technology (TUT) |
| 5th Author's Name | Kazuaki Sawada |
| 5th Author's Affiliation | Toyohashi University of Technology/JST-CREST (TUT/JST) |
| 6th Author's Name | Kazuhiro Takahashi |
| 6th Author's Affiliation | Toyohashi University of Technology/JST-PRESTO (TUT/JST) |
| 7th Author's Name | |
| 7th Author's Affiliation | () |
| 8th Author's Name | |
| 8th Author's Affiliation | () |
| 9th Author's Name | |
| 9th Author's Affiliation | () |
| 10th Author's Name | |
| 10th Author's Affiliation | () |
| 11th Author's Name | |
| 11th Author's Affiliation | () |
| 12th Author's Name | |
| 12th Author's Affiliation | () |
| 13th Author's Name | |
| 13th Author's Affiliation | () |
| 14th Author's Name | |
| 14th Author's Affiliation | () |
| 15th Author's Name | |
| 15th Author's Affiliation | () |
| 16th Author's Name | |
| 16th Author's Affiliation | () |
| 17th Author's Name | |
| 17th Author's Affiliation | () |
| 18th Author's Name | |
| 18th Author's Affiliation | () |
| Speaker | Author-1 |
| Date Time | 2017-08-09 13:55:00 |
| Presentation Time | 25 minutes |
| Registration for | ED |
| Paper # | ED2017-28 |
| Volume (vol) | vol.117 |
| Number (no) | no.172 |
| Page | pp.5-8 |
| #Pages | 4 |
| Date of Issue | 2017-08-02 (ED) |
[Return to Top Page]