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Paper Abstract and Keywords
Presentation
2017-06-20 16:10
Low-Carrier-Density Sputtered-MoS2 Film by Vapor-Phase- Sulfurization
Kentaro Matsuura
,
Takumi Ohashi
,
Iriya Muneta
(
Tokyo Tech
),
Seiya Ishihara
(
Meiji Univ.
),
Kuniyuki Kakushima
,
Kazuo Tsutsui
(
Tokyo Tech
),
Atsushi Ogura
(
Meiji Univ.
),
Hitoshi Wakabayashi
(
Tokyo Tech
)
Abstract
(in Japanese)
(See Japanese page)
(in English)
(Not available yet)
Keyword
(in Japanese)
(See Japanese page)
(in English)
/ / / / / / /
Reference Info.
IEICE Tech. Rep.
Paper #
Date of Issue
ISSN
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Conference Information
Committee
SDM
Conference Date
2017-06-20 - 2017-06-20
Place (in Japanese)
(See Japanese page)
Place (in English)
Campus Innovation Center Tokyo
Topics (in Japanese)
(See Japanese page)
Topics (in English)
Material Science and Process Technology for MOS Devices and Memories
Paper Information
Registration To
SDM
Conference Code
2017-06-SDM
Language
Japanese
Title (in Japanese)
(See Japanese page)
Sub Title (in Japanese)
(See Japanese page)
Title (in English)
Low-Carrier-Density Sputtered-MoS2 Film by Vapor-Phase- Sulfurization
Sub Title (in English)
Keyword(1)
Keyword(2)
Keyword(3)
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1st Author's Name
Kentaro Matsuura
1st Author's Affiliation
Tokyo Institute of Technology
(
Tokyo Tech
)
2nd Author's Name
Takumi Ohashi
2nd Author's Affiliation
Tokyo Institute of Technology
(
Tokyo Tech
)
3rd Author's Name
Iriya Muneta
3rd Author's Affiliation
Tokyo Institute of Technology
(
Tokyo Tech
)
4th Author's Name
Seiya Ishihara
4th Author's Affiliation
Meiji University
(
Meiji Univ.
)
5th Author's Name
Kuniyuki Kakushima
5th Author's Affiliation
Tokyo Institute of Technology
(
Tokyo Tech
)
6th Author's Name
Kazuo Tsutsui
6th Author's Affiliation
Tokyo Institute of Technology
(
Tokyo Tech
)
7th Author's Name
Atsushi Ogura
7th Author's Affiliation
Meiji University
(
Meiji Univ.
)
8th Author's Name
Hitoshi Wakabayashi
8th Author's Affiliation
Tokyo Institute of Technology
(
Tokyo Tech
)
9th Author's Name
9th Author's Affiliation
()
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()
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()
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Speaker
Author-1
Date Time
2017-06-20 16:10:00
Presentation Time
20 minutes
Registration for
SDM
Paper #
Volume (vol)
vol.117
Number (no)
no.101
Page
#Pages
Date of Issue
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