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| Presentation | 2017-01-30 13:30 [Invited Talk] First Demonstration of FinFET Split-Gate MONOS for High-Speed and Highly-Reliable Embedded Flash in 16/14nm-node and Beyond Shibun Tsuda, Yoshiyuki Kawashima, Kenichiro Sonoda, Atsushi Yoshitomi, Tatsuyoshi Mihara, Shunichi Narumi, Masao Inoue, Seiji Muranaka, Takahiro Maruyama, Tomohiro Yamashita, Yasuo Yamaguchi (Renesas Electronics), Digh Hisamoto (Hitachi)  SDM2016-134 Link to ES Tech. Rep. Archives: SDM2016-134 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | FinFET split-gate metal-oxide nitride oxide silicon (SG-MONOS) Flash memories have been fabricated and operated for the first time. Excellent subthreshold characteristics and small threshold-voltage variability owing to a Fin-structure are clarified. It is demonstrated that Fin top-corner effects are well suppressed by incremental step pulse programming for source side injection. Highly reliable data retention at 150 ºC after 250K program/erase cycles is confirmed for advanced automotive system applications. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | embedded Flash memory / split gate cell / MONOS / FinFET / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 116, no. 448, SDM2016-134, pp. 17-20, Jan. 2017. | |
| Paper # | SDM2016-134 | |
| Date of Issue | 2017-01-23 (SDM) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | SDM2016-134 Link to ES Tech. Rep. Archives: SDM2016-134 |
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| Conference Information | |
| Committee | SDM |
| Conference Date | 2017-01-30 - 2017-01-30 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Paper Information | |
| Registration To | SDM |
| Conference Code | 2017-01-SDM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | First Demonstration of FinFET Split-Gate MONOS for High-Speed and Highly-Reliable Embedded Flash in 16/14nm-node and Beyond |
| Sub Title (in English) | |
| Keyword(1) | embedded Flash memory |
| Keyword(2) | split gate cell |
| Keyword(3) | MONOS |
| Keyword(4) | FinFET |
| Keyword(5) | |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Shibun Tsuda |
| 1st Author's Affiliation | Renesas Electronics Corporation (Renesas Electronics) |
| 2nd Author's Name | Yoshiyuki Kawashima |
| 2nd Author's Affiliation | Renesas Electronics Corporation (Renesas Electronics) |
| 3rd Author's Name | Kenichiro Sonoda |
| 3rd Author's Affiliation | Renesas Electronics Corporation (Renesas Electronics) |
| 4th Author's Name | Atsushi Yoshitomi |
| 4th Author's Affiliation | Renesas Electronics Corporation (Renesas Electronics) |
| 5th Author's Name | Tatsuyoshi Mihara |
| 5th Author's Affiliation | Renesas Electronics Corporation (Renesas Electronics) |
| 6th Author's Name | Shunichi Narumi |
| 6th Author's Affiliation | Renesas Electronics Corporation (Renesas Electronics) |
| 7th Author's Name | Masao Inoue |
| 7th Author's Affiliation | Renesas Electronics Corporation (Renesas Electronics) |
| 8th Author's Name | Seiji Muranaka |
| 8th Author's Affiliation | Renesas Electronics Corporation (Renesas Electronics) |
| 9th Author's Name | Takahiro Maruyama |
| 9th Author's Affiliation | Renesas Electronics Corporation (Renesas Electronics) |
| 10th Author's Name | Tomohiro Yamashita |
| 10th Author's Affiliation | Renesas Electronics Corporation (Renesas Electronics) |
| 11th Author's Name | Yasuo Yamaguchi |
| 11th Author's Affiliation | Renesas Electronics Corporation (Renesas Electronics) |
| 12th Author's Name | Digh Hisamoto |
| 12th Author's Affiliation | Hitachi, Ltd. (Hitachi) |
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| 13th Author's Affiliation | () |
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| 14th Author's Affiliation | () |
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| 15th Author's Affiliation | () |
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| 16th Author's Affiliation | () |
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| 17th Author's Affiliation | () |
| 18th Author's Name | |
| 18th Author's Affiliation | () |
| Speaker | Author-1 |
| Date Time | 2017-01-30 13:30:00 |
| Presentation Time | 30 minutes |
| Registration for | SDM |
| Paper # | SDM2016-134 |
| Volume (vol) | vol.116 |
| Number (no) | no.448 |
| Page | pp.17-20 |
| #Pages | 4 |
| Date of Issue | 2017-01-23 (SDM) |
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