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Paper Abstract and Keywords
Presentation 2016-10-21 11:10
Photometric Stereo by SEM Image Utilizing Region Division
Hiroki Matsuse, Gou Koutaki, Keiichi Uchimura (Kumamoto Univ.), Atsushi Miyamoto (Hitachi) PRMU2016-100
Abstract (in Japanese) (See Japanese page) 
(in English) In this paper, we present a three-dimensional (3D) reconstruction method for semiconductor pattern using a scanning electron microscope (SEM). 3D reconstruction method for semiconductor pattern using SEM images by photometric stereo has been proposed several, however they have a problem that reconstruction shape is distorted due to shadows. Our proposed method divides processing image into three regions: foreground, background and middle, and sets up geometrical constraints for each region. As a result, our method restrains the shape distortion by shadows and compensates the shadow accurately. Through the application result of our method for the actual semiconductor pattern, this method indicates that perform a stable 3D reconstruction.
Keyword (in Japanese) (See Japanese page) 
(in English) Scanning Electron Microscope (SEM) / Photometric Stereo / Region Division / Shadowing Compensation / Semiconductor Measurement / / /  
Reference Info. IEICE Tech. Rep., vol. 116, no. 259, PRMU2016-100, pp. 55-60, Oct. 2016.
Paper # PRMU2016-100 
Date of Issue 2016-10-13 (PRMU) 
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF PRMU2016-100

Conference Information
Committee PRMU  
Conference Date 2016-10-20 - 2016-10-21 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To PRMU 
Conference Code 2016-10-PRMU 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Photometric Stereo by SEM Image Utilizing Region Division 
Sub Title (in English)  
Keyword(1) Scanning Electron Microscope (SEM)  
Keyword(2) Photometric Stereo  
Keyword(3) Region Division  
Keyword(4) Shadowing Compensation  
Keyword(5) Semiconductor Measurement  
1st Author's Name Hiroki Matsuse  
1st Author's Affiliation Kumamoto University (Kumamoto Univ.)
2nd Author's Name Gou Koutaki  
2nd Author's Affiliation Kumamoto University (Kumamoto Univ.)
3rd Author's Name Keiichi Uchimura  
3rd Author's Affiliation Kumamoto University (Kumamoto Univ.)
4th Author's Name Atsushi Miyamoto  
4th Author's Affiliation Hitachi Ltd. (Hitachi)
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Date Time 2016-10-21 11:10:00 
Presentation Time 30 
Registration for PRMU 
Paper # IEICE-PRMU2016-100 
Volume (vol) IEICE-116 
Number (no) no.259 
Page pp.55-60 
#Pages IEICE-6 
Date of Issue IEICE-PRMU-2016-10-13 

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