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Paper Abstract and Keywords
Presentation 2016-08-01 14:30
[Invited Talk] Novel Pixel Structure with Stacked Deep Photodiode to Achieve High NIR Sensitivity and High MTF
Hiroki Takahashi, Hiroshi Tanaka, Masahiro Oda, Mitsuyoshi Ando, Naoto Niisoe (TPSCo), Shinichi Kawai, Takuya Asano, Mitsugu Yoshita, Tohru Yamada (PSCS) SDM2016-51 ICD2016-19 Link to ES Tech. Rep. Archives: SDM2016-51 ICD2016-19
Abstract (in Japanese) (See Japanese page) 
(in English) Novel pixel structure with Stacked Deep Photodiode (SDP) has been newly developed for both high Near Infra-Red (NIR) sensitivity and high Modulation Transfer Function (MTF). SDP with 5.4µm pixel pitch has achieved Quantum Efficiency (QE) of 30% and MTF of 40% at Nyquist frequency at 850nm wavelength by stacking photodiode completely separated from neighboring pixels. Furthermore, Shifted SDP which can be optimized for oblique incident light has suppressed crosstalk as low as 1.5% at 25 º at 850 nm wavelength.
Keyword (in Japanese) (See Japanese page) 
(in English) NIR / MTF / Stack / Image sensor / Crosstalk / / /  
Reference Info. IEICE Tech. Rep., vol. 116, no. 172, SDM2016-51, pp. 41-44, Aug. 2016.
Paper # SDM2016-51 
Date of Issue 2016-07-25 (SDM, ICD) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee ICD SDM ITE-IST  
Conference Date 2016-08-01 - 2016-08-03 
Place (in Japanese) (See Japanese page) 
Place (in English) Central Electric Club 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Analog, Mixed Analog and Digital, RF, and Sensor Interface, Low voltage/low power techniques, novel devices, circuits, and applications 
Paper Information
Registration To SDM 
Conference Code 2016-08-ICD-SDM-IST 
Language English (Japanese title is available) 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Novel Pixel Structure with Stacked Deep Photodiode to Achieve High NIR Sensitivity and High MTF 
Sub Title (in English)  
Keyword(1) NIR  
Keyword(2) MTF  
Keyword(3) Stack  
Keyword(4) Image sensor  
Keyword(5) Crosstalk  
Keyword(6)  
Keyword(7)  
Keyword(8)  
1st Author's Name Hiroki Takahashi  
1st Author's Affiliation TowerJazz Panasonic Semiconductor Co., Ltd. (TPSCo)
2nd Author's Name Hiroshi Tanaka  
2nd Author's Affiliation TowerJazz Panasonic Semiconductor Co., Ltd. (TPSCo)
3rd Author's Name Masahiro Oda  
3rd Author's Affiliation TowerJazz Panasonic Semiconductor Co., Ltd. (TPSCo)
4th Author's Name Mitsuyoshi Ando  
4th Author's Affiliation TowerJazz Panasonic Semiconductor Co., Ltd. (TPSCo)
5th Author's Name Naoto Niisoe  
5th Author's Affiliation TowerJazz Panasonic Semiconductor Co., Ltd. (TPSCo)
6th Author's Name Shinichi Kawai  
6th Author's Affiliation Panasonic Semiconductor Solutions Co., Ltd. (PSCS)
7th Author's Name Takuya Asano  
7th Author's Affiliation Panasonic Semiconductor Solutions Co., Ltd. (PSCS)
8th Author's Name Mitsugu Yoshita  
8th Author's Affiliation Panasonic Semiconductor Solutions Co., Ltd. (PSCS)
9th Author's Name Tohru Yamada  
9th Author's Affiliation Panasonic Semiconductor Solutions Co., Ltd. (PSCS)
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Speaker Author-1 
Date Time 2016-08-01 14:30:00 
Presentation Time 45 minutes 
Registration for SDM 
Paper # SDM2016-51, ICD2016-19 
Volume (vol) vol.116 
Number (no) no.172(SDM), no.173(ICD) 
Page pp.41-44 
#Pages
Date of Issue 2016-07-25 (SDM, ICD) 


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