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| Presentation | 2016-05-19 13:00 Fabrication of CVD single-layer graphene diaphragm above a nano cavity by dry transfer technique Hayato Ishida, Makoto Ishida (Toyohashi Tech.), Kazuaki Sawada, Kazuhiro Takahashi (Toyohashi Tech./EIIRIS)  ED2016-13 CPM2016-1 SDM2016-18 Link to ES Tech. Rep. Archives: ED2016-13 CPM2016-1 SDM2016-18 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | Recent research on a technique for transferring a CVD graphene on any substrate has been actively conducted. In this work, for the application of the resonator device of graphene, we proposed a dry transfer technique with a simple and low temperature. As a result, we succeeded cavity fabrication of edge-clamped drum structure by transferring CVD single-layer graphene, the cavity size was achieved to be maximum diameter of 6 m and the minimum depth of 670 nm. We obtained Raman spectrum with 2D / G ratio of 1.88 and few D peak, which indicated that the edge-clamped drum structure of the high-quality single-layer graphene was achieved. Further, by observation of Raman spectrum, we experimentally demonstrated the usability of PMMA removal in liquid in the fabrication of edge-clamped drum structure using dry transfer with PMMA. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | NEMS / MEMS / graphene / dry transfer / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 116, no. 50, SDM2016-18, pp. 1-4, May 2016. | |
| Paper # | SDM2016-18 | |
| Date of Issue | 2016-05-12 (ED, CPM, SDM) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | ED2016-13 CPM2016-1 SDM2016-18 Link to ES Tech. Rep. Archives: ED2016-13 CPM2016-1 SDM2016-18 |
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| Conference Information | |
| Committee | CPM ED SDM |
| Conference Date | 2016-05-19 - 2016-05-20 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Shizuoka University, Hamamatsu campus (Joint Research Lab.) |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | crystal growth、devices characterization , etc. |
| Paper Information | |
| Registration To | SDM |
| Conference Code | 2016-05-CPM-ED-SDM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of CVD single-layer graphene diaphragm above a nano cavity by dry transfer technique |
| Sub Title (in English) | |
| Keyword(1) | NEMS |
| Keyword(2) | MEMS |
| Keyword(3) | graphene |
| Keyword(4) | dry transfer |
| Keyword(5) | |
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| 1st Author's Name | Hayato Ishida |
| 1st Author's Affiliation | Toyohashi University of Technology (Toyohashi Tech.) |
| 2nd Author's Name | Makoto Ishida |
| 2nd Author's Affiliation | Toyohashi University of Technology (Toyohashi Tech.) |
| 3rd Author's Name | Kazuaki Sawada |
| 3rd Author's Affiliation | Toyohashi University of Technology/2Electronis-inspired Interdisciplinary Research Institute (Toyohashi Tech./EIIRIS) |
| 4th Author's Name | Kazuhiro Takahashi |
| 4th Author's Affiliation | Toyohashi University of Technology/2Electronis-inspired Interdisciplinary Research Institute (Toyohashi Tech./EIIRIS) |
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| Speaker | Author-1 |
| Date Time | 2016-05-19 13:00:00 |
| Presentation Time | 25 minutes |
| Registration for | SDM |
| Paper # | ED2016-13, CPM2016-1, SDM2016-18 |
| Volume (vol) | vol.116 |
| Number (no) | no.48(ED), no.49(CPM), no.50(SDM) |
| Page | pp.1-4 |
| #Pages | 4 |
| Date of Issue | 2016-05-12 (ED, CPM, SDM) |
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