Paper Abstract and Keywords |
Presentation |
2016-05-11 10:25
Self-Aligned Double Patterning-Aware Two-color Grid Routing Hatsuhiko Miura, Mitsuru Hasegawa, Taku Hirukawa, Kunihiro Fujiyoshi (TUAT) VLD2016-2 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
Self-Aligned Double Patterning (SADP) is one of the promising manufacturing option to overcome the limit of miniaturization. However, routing design for SADP process is very complicated. In this paper, we propose a thoughtful routing method using two-color grid for SADP process. It may solve high density routing problems which cannot be solved by previous methods. Experimental results indicate that our method achieves shorter wire length. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Double Patterning / SADP / Grid Routing / / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 116, no. 21, VLD2016-2, pp. 5-10, May 2016. |
Paper # |
VLD2016-2 |
Date of Issue |
2016-05-04 (VLD) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
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VLD2016-2 |
Conference Information |
Committee |
VLD IPSJ-SLDM |
Conference Date |
2016-05-11 - 2016-05-11 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Kitakyushu International Conference Center |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
System Design, etc. |
Paper Information |
Registration To |
VLD |
Conference Code |
2016-05-VLD-SLDM |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Self-Aligned Double Patterning-Aware Two-color Grid Routing |
Sub Title (in English) |
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Keyword(1) |
Double Patterning |
Keyword(2) |
SADP |
Keyword(3) |
Grid Routing |
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1st Author's Name |
Hatsuhiko Miura |
1st Author's Affiliation |
Tokyo University of Agriculture and Technology (TUAT) |
2nd Author's Name |
Mitsuru Hasegawa |
2nd Author's Affiliation |
Tokyo University of Agriculture and Technology (TUAT) |
3rd Author's Name |
Taku Hirukawa |
3rd Author's Affiliation |
Tokyo University of Agriculture and Technology (TUAT) |
4th Author's Name |
Kunihiro Fujiyoshi |
4th Author's Affiliation |
Tokyo University of Agriculture and Technology (TUAT) |
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Speaker |
Author-1 |
Date Time |
2016-05-11 10:25:00 |
Presentation Time |
25 minutes |
Registration for |
VLD |
Paper # |
VLD2016-2 |
Volume (vol) |
vol.116 |
Number (no) |
no.21 |
Page |
pp.5-10 |
#Pages |
6 |
Date of Issue |
2016-05-04 (VLD) |
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