Paper Abstract and Keywords |
Presentation |
2016-04-21 14:55
Fabrication of silicon chips with micro-apertures for formation of stable artificial bilayer lipid membranes Daisuke Tadaki, Ayumi Hirano-Iwata (Tohoku Univ.), Kenichi Ishibashi (Hang-Ichi), Shun Araki, Miyu Yoshida, Kohei Arata, Takeshi Ohori, Hideaki Yamamoto, Michio Niwano (Tohoku Univ.) ED2016-2 Link to ES Tech. Rep. Archives: ED2016-2 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
Bilayer lipid membranes (BLMs) that cover trillions of cells in our body have features of a nanometer scale thickness and a high resistivity. Artificially reconstituted BLMs serve, therefore, as a supporting material for incorporating ion channel proteins, and the incorporated BLMs can function as highly detective bio-sensors. Previously, we succeeded in the formation of mechanically stable BLMs by preparing membranes in micro-apertures formed in silicon (Si) chips using a semiconductor microfabrication technique. The BLM stabilization is due to the smoothly tapered shape of the aperture edge, which reduces the stress on the bilayer. However, there existed a fundamental problem that the micro-aperture oftentimes came with cracks and the reproducibility of fabricating proper chips was unsatisfactory. In order to solve the problem, we focused on the nanoscale structure at each step of Si chip fabrication, and succeeded in reaching 83% (n = 209) of the yield by improvements such as the change of etchant, the optimization of the temperature control of etchant, and the avoidance of the excessive etching. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
artificial bilayer lipid membranes (BLMs) / semiconductor microfabrication process / ion channel sensor / / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 116, no. 14, ED2016-2, pp. 5-7, April 2016. |
Paper # |
ED2016-2 |
Date of Issue |
2016-04-14 (ED) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
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ED2016-2 Link to ES Tech. Rep. Archives: ED2016-2 |
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