| IEICE Technical Committee Submission System Conference Paper's Information |
Online Proceedings [Sign in] Tech. Rep. Archives |
| Go Top Page | Go Previous | [Japanese] / [English] |
| Paper Abstract and Keywords | ||
| Presentation | 2015-12-14 14:00 Characterization of GaxSn1-xO thin film by the mist CVD method Masahiro Yuge, Junji Ogawa, Tosihiro Yosioka, Yuta Kato, Tokiyosi Matsuda, Mutsumi Kimura (Ryukoku Univ)  EID2015-16 SDM2015-99 Link to ES Tech. Rep. Archives: EID2015-16 SDM2015-99 |
|
| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | Thin films of GaxSn1-xO (GTO) for an active layer of thin film transistor (TFT) were deposited with different substrate temperature and deposition time on glass substrates by the mist CVD method with non-vacuum process. Optical transmittances of GTO thin film were higher than 80% for all deposition time. Sheet resistances of GTO thin films were decreased deposited at 450℃, and 500℃ with longer deposition time. Relationships between the sheet resistance and deposition time were not inverse proportion. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Oxide semiconductor / GaSnO thin film / mist CVD / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 115, no. 362, EID2015-16, pp. 31-34, Dec. 2015. | |
| Paper # | EID2015-16 | |
| Date of Issue | 2015-12-07 (EID, SDM) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | EID2015-16 SDM2015-99 Link to ES Tech. Rep. Archives: EID2015-16 SDM2015-99 |
|
| Conference Information | |
| Committee | EID SDM |
| Conference Date | 2015-12-14 - 2015-12-14 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Ryukoku University, Avanti Kyoto Hall |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Si and Si-related Materials and Devices, and Display Technology |
| Paper Information | |
| Registration To | EID |
| Conference Code | 2015-12-EID-SDM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Characterization of GaxSn1-xO thin film by the mist CVD method |
| Sub Title (in English) | |
| Keyword(1) | Oxide semiconductor |
| Keyword(2) | GaSnO thin film |
| Keyword(3) | mist CVD |
| Keyword(4) | |
| Keyword(5) | |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Masahiro Yuge |
| 1st Author's Affiliation | Ryukoku University (Ryukoku Univ) |
| 2nd Author's Name | Junji Ogawa |
| 2nd Author's Affiliation | Ryukoku University (Ryukoku Univ) |
| 3rd Author's Name | Tosihiro Yosioka |
| 3rd Author's Affiliation | Ryukoku University (Ryukoku Univ) |
| 4th Author's Name | Yuta Kato |
| 4th Author's Affiliation | Ryukoku University (Ryukoku Univ) |
| 5th Author's Name | Tokiyosi Matsuda |
| 5th Author's Affiliation | Ryukoku University (Ryukoku Univ) |
| 6th Author's Name | Mutsumi Kimura |
| 6th Author's Affiliation | Ryukoku University (Ryukoku Univ) |
| 7th Author's Name | |
| 7th Author's Affiliation | () |
| 8th Author's Name | |
| 8th Author's Affiliation | () |
| 9th Author's Name | |
| 9th Author's Affiliation | () |
| 10th Author's Name | |
| 10th Author's Affiliation | () |
| 11th Author's Name | |
| 11th Author's Affiliation | () |
| 12th Author's Name | |
| 12th Author's Affiliation | () |
| 13th Author's Name | |
| 13th Author's Affiliation | () |
| 14th Author's Name | |
| 14th Author's Affiliation | () |
| 15th Author's Name | |
| 15th Author's Affiliation | () |
| 16th Author's Name | |
| 16th Author's Affiliation | () |
| 17th Author's Name | |
| 17th Author's Affiliation | () |
| 18th Author's Name | |
| 18th Author's Affiliation | () |
| Speaker | Author-1 |
| Date Time | 2015-12-14 14:00:00 |
| Presentation Time | 15 minutes |
| Registration for | EID |
| Paper # | EID2015-16, SDM2015-99 |
| Volume (vol) | vol.115 |
| Number (no) | no.362(EID), no.363(SDM) |
| Page | pp.31-34 |
| #Pages | 4 |
| Date of Issue | 2015-12-07 (EID, SDM) |
[Return to Top Page]