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| Presentation | 2015-12-14 11:30 Memory Application of Ultrafine FET utilizing Supramolecular Protein Takahiko Ban, Mutsunori Uenuma (NAIST), Shinji Migita (AIST), Yasuaki Ishikawa, Ichiro Yamashita, Yukiharu Uraoka (NAIST)  EID2015-11 SDM2015-94 Link to ES Tech. Rep. Archives: EID2015-11 SDM2015-94 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | Metal nanoparticles (NPs) embedded in junctionless field-effect transistors (JL-FETs) with a length of 3.6 nm is fabricated and demonstrated. The anisotropic wet etching of a silicon-on-insulator (SOI) substrate was utilized to form V-grooves and to define nanometer-scale channel. Metal NPs are selectively placed onto bottom of V-groove using the Baio nano process (BNP). The JL-FET is applied to floating gate memory and used to investigate an impact on the short channel by charge trap of NPs. Low-voltage operation and broad threshold voltage shift as memory behavior are appeared in 3.6 nm channel length. It is expected that the JL-FETs can overcome the scaling limitations in floating gate memory, while the charge trap cause major problems in the sub 10 nm region. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Bio Nano Process / Junctionless-FET / Nano-particle / Memory / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 115, no. 362, EID2015-11, pp. 9-12, Dec. 2015. | |
| Paper # | EID2015-11 | |
| Date of Issue | 2015-12-07 (EID, SDM) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | EID2015-11 SDM2015-94 Link to ES Tech. Rep. Archives: EID2015-11 SDM2015-94 |
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| Conference Information | |
| Committee | EID SDM |
| Conference Date | 2015-12-14 - 2015-12-14 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Ryukoku University, Avanti Kyoto Hall |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Si and Si-related Materials and Devices, and Display Technology |
| Paper Information | |
| Registration To | EID |
| Conference Code | 2015-12-EID-SDM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Memory Application of Ultrafine FET utilizing Supramolecular Protein |
| Sub Title (in English) | |
| Keyword(1) | Bio Nano Process |
| Keyword(2) | Junctionless-FET |
| Keyword(3) | Nano-particle |
| Keyword(4) | Memory |
| Keyword(5) | |
| Keyword(6) | |
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| Keyword(8) | |
| 1st Author's Name | Takahiko Ban |
| 1st Author's Affiliation | Nara Insutitute of Science and Technology (NAIST) |
| 2nd Author's Name | Mutsunori Uenuma |
| 2nd Author's Affiliation | Nara Insutitute of Science and Technology (NAIST) |
| 3rd Author's Name | Shinji Migita |
| 3rd Author's Affiliation | National Institute of Advanced Industrial Science and Technology (AIST) |
| 4th Author's Name | Yasuaki Ishikawa |
| 4th Author's Affiliation | Nara Insutitute of Science and Technology (NAIST) |
| 5th Author's Name | Ichiro Yamashita |
| 5th Author's Affiliation | Nara Insutitute of Science and Technology (NAIST) |
| 6th Author's Name | Yukiharu Uraoka |
| 6th Author's Affiliation | Nara Insutitute of Science and Technology (NAIST) |
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| Speaker | Author-1 |
| Date Time | 2015-12-14 11:30:00 |
| Presentation Time | 15 minutes |
| Registration for | EID |
| Paper # | EID2015-11, SDM2015-94 |
| Volume (vol) | vol.115 |
| Number (no) | no.362(EID), no.363(SDM) |
| Page | pp.9-12 |
| #Pages | 4 |
| Date of Issue | 2015-12-07 (EID, SDM) |
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