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Paper Abstract and Keywords
Presentation 2015-12-02 16:45
Layout Decomposition into L-Shaped Parts for Variable Shaped-Beam Mask Writer
Katsuya Hoshi, Kunihiro Fujiyoshi (TUAT)
Abstract (in Japanese) (See Japanese page) 
(in English) Since electron beam mask writers for LSI mask fabrication can only expose a rectangle shaped-beam, a layout pattern has to be decomposed into a set of rectangles, and then they are fabricated by the mask writing machine. Because of the increase of transistors in one chip, the number of rectangles in a layout is increased, so manufacturing cost is also increased. So, a method which decomposes a layout into rectangles and L-Shaped polygons was proposed on the assumption that mask writers can expose a L-Shaped beam. However, this method cannnot always obtain a set of polygons of the minimum number. In this paper, we propose a new algorithm which can decompose a layout into minimum number of rectangles and L-Shaped polygons using dynamic programming.
Keyword (in Japanese) (See Japanese page) 
(in English) L-Shape Fracturing / Dynamic Programming / Variable Shaped Beam Mask Writer / Mask Data / / / /  
Reference Info. IEICE Tech. Rep., vol. 115, no. 338, VLD2015-52, pp. 87-92, Dec. 2015.
Paper # VLD2015-52 
Date of Issue 2015-11-24 (VLD, DC) 
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380

Conference Information
Committee VLD DC IPSJ-SLDM CPSY RECONF ICD CPM  
Conference Date 2015-12-01 - 2015-12-03 
Place (in Japanese) (See Japanese page) 
Place (in English) Nagasaki Kinro Fukushi Kaikan 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Design Gaia 2015 -New Field of VLSI Design- 
Paper Information
Registration To VLD 
Conference Code 2015-12-VLD-DC-SLDM-CPSY-RECONF-ICD-CPM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Layout Decomposition into L-Shaped Parts for Variable Shaped-Beam Mask Writer 
Sub Title (in English)  
Keyword(1) L-Shape Fracturing  
Keyword(2) Dynamic Programming  
Keyword(3) Variable Shaped Beam Mask Writer  
Keyword(4) Mask Data  
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1st Author's Name Katsuya Hoshi  
1st Author's Affiliation Tokyo University of Agriculture and Technology (TUAT)
2nd Author's Name Kunihiro Fujiyoshi  
2nd Author's Affiliation Tokyo University of Agriculture and Technology (TUAT)
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Speaker
Date Time 2015-12-02 16:45:00 
Presentation Time 25 
Registration for VLD 
Paper # IEICE-VLD2015-52,IEICE-DC2015-48 
Volume (vol) IEICE-115 
Number (no) no.338(VLD), no.339(DC) 
Page pp.87-92 
#Pages IEICE-6 
Date of Issue IEICE-VLD-2015-11-24,IEICE-DC-2015-11-24 


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