| IEICE Technical Committee Submission System Conference Paper's Information |
Online Proceedings [Sign in] Tech. Rep. Archives |
| Go Top Page | Go Previous | [Japanese] / [English] |
| Paper Abstract and Keywords | ||
| Presentation | 2015-12-02 16:45 Layout Decomposition into L-Shaped Parts for Variable Shaped-Beam Mask Writer Katsuya Hoshi, Kunihiro Fujiyoshi (TUAT)  VLD2015-52 DC2015-48 |
|
| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | Since electron beam mask writers for LSI mask fabrication can only expose a rectangle shaped-beam, a layout pattern has to be decomposed into a set of rectangles, and then they are fabricated by the mask writing machine. Because of the increase of transistors in one chip, the number of rectangles in a layout is increased, so manufacturing cost is also increased. So, a method which decomposes a layout into rectangles and L-Shaped polygons was proposed on the assumption that mask writers can expose a L-Shaped beam. However, this method cannnot always obtain a set of polygons of the minimum number. In this paper, we propose a new algorithm which can decompose a layout into minimum number of rectangles and L-Shaped polygons using dynamic programming. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | L-Shape Fracturing / Dynamic Programming / Variable Shaped Beam Mask Writer / Mask Data / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 115, no. 338, VLD2015-52, pp. 87-92, Dec. 2015. | |
| Paper # | VLD2015-52 | |
| Date of Issue | 2015-11-24 (VLD, DC) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | VLD2015-52 DC2015-48 |
|
| Conference Information | |
| Committee | VLD DC IPSJ-SLDM CPSY RECONF ICD CPM |
| Conference Date | 2015-12-01 - 2015-12-03 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Nagasaki Kinro Fukushi Kaikan |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Design Gaia 2015 -New Field of VLSI Design- |
| Paper Information | |
| Registration To | VLD |
| Conference Code | 2015-12-VLD-DC-SLDM-CPSY-RECONF-ICD-CPM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Layout Decomposition into L-Shaped Parts for Variable Shaped-Beam Mask Writer |
| Sub Title (in English) | |
| Keyword(1) | L-Shape Fracturing |
| Keyword(2) | Dynamic Programming |
| Keyword(3) | Variable Shaped Beam Mask Writer |
| Keyword(4) | Mask Data |
| Keyword(5) | |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Katsuya Hoshi |
| 1st Author's Affiliation | Tokyo University of Agriculture and Technology (TUAT) |
| 2nd Author's Name | Kunihiro Fujiyoshi |
| 2nd Author's Affiliation | Tokyo University of Agriculture and Technology (TUAT) |
| 3rd Author's Name | |
| 3rd Author's Affiliation | () |
| 4th Author's Name | |
| 4th Author's Affiliation | () |
| 5th Author's Name | |
| 5th Author's Affiliation | () |
| 6th Author's Name | |
| 6th Author's Affiliation | () |
| 7th Author's Name | |
| 7th Author's Affiliation | () |
| 8th Author's Name | |
| 8th Author's Affiliation | () |
| 9th Author's Name | |
| 9th Author's Affiliation | () |
| 10th Author's Name | |
| 10th Author's Affiliation | () |
| 11th Author's Name | |
| 11th Author's Affiliation | () |
| 12th Author's Name | |
| 12th Author's Affiliation | () |
| 13th Author's Name | |
| 13th Author's Affiliation | () |
| 14th Author's Name | |
| 14th Author's Affiliation | () |
| 15th Author's Name | |
| 15th Author's Affiliation | () |
| 16th Author's Name | |
| 16th Author's Affiliation | () |
| 17th Author's Name | |
| 17th Author's Affiliation | () |
| 18th Author's Name | |
| 18th Author's Affiliation | () |
| Speaker | Author-1 |
| Date Time | 2015-12-02 16:45:00 |
| Presentation Time | 25 minutes |
| Registration for | VLD |
| Paper # | VLD2015-52, DC2015-48 |
| Volume (vol) | vol.115 |
| Number (no) | no.338(VLD), no.339(DC) |
| Page | pp.87-92 |
| #Pages | 6 |
| Date of Issue | 2015-11-24 (VLD, DC) |
[Return to Top Page]