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Paper Abstract and Keywords
Presentation 2015-12-02 16:45
Layout Decomposition into L-Shaped Parts for Variable Shaped-Beam Mask Writer
Katsuya Hoshi, Kunihiro Fujiyoshi (TUAT) VLD2015-52 DC2015-48
Abstract (in Japanese) (See Japanese page) 
(in English) Since electron beam mask writers for LSI mask fabrication can only expose a rectangle shaped-beam, a layout pattern has to be decomposed into a set of rectangles, and then they are fabricated by the mask writing machine. Because of the increase of transistors in one chip, the number of rectangles in a layout is increased, so manufacturing cost is also increased. So, a method which decomposes a layout into rectangles and L-Shaped polygons was proposed on the assumption that mask writers can expose a L-Shaped beam. However, this method cannnot always obtain a set of polygons of the minimum number. In this paper, we propose a new algorithm which can decompose a layout into minimum number of rectangles and L-Shaped polygons using dynamic programming.
Keyword (in Japanese) (See Japanese page) 
(in English) L-Shape Fracturing / Dynamic Programming / Variable Shaped Beam Mask Writer / Mask Data / / / /  
Reference Info. IEICE Tech. Rep., vol. 115, no. 338, VLD2015-52, pp. 87-92, Dec. 2015.
Paper # VLD2015-52 
Date of Issue 2015-11-24 (VLD, DC) 
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF VLD2015-52 DC2015-48

Conference Information
Conference Date 2015-12-01 - 2015-12-03 
Place (in Japanese) (See Japanese page) 
Place (in English) Nagasaki Kinro Fukushi Kaikan 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Design Gaia 2015 -New Field of VLSI Design- 
Paper Information
Registration To VLD 
Conference Code 2015-12-VLD-DC-SLDM-CPSY-RECONF-ICD-CPM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Layout Decomposition into L-Shaped Parts for Variable Shaped-Beam Mask Writer 
Sub Title (in English)  
Keyword(1) L-Shape Fracturing  
Keyword(2) Dynamic Programming  
Keyword(3) Variable Shaped Beam Mask Writer  
Keyword(4) Mask Data  
1st Author's Name Katsuya Hoshi  
1st Author's Affiliation Tokyo University of Agriculture and Technology (TUAT)
2nd Author's Name Kunihiro Fujiyoshi  
2nd Author's Affiliation Tokyo University of Agriculture and Technology (TUAT)
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Date Time 2015-12-02 16:45:00 
Presentation Time 25 
Registration for VLD 
Paper # IEICE-VLD2015-52,IEICE-DC2015-48 
Volume (vol) IEICE-115 
Number (no) no.338(VLD), no.339(DC) 
Page pp.87-92 
#Pages IEICE-6 
Date of Issue IEICE-VLD-2015-11-24,IEICE-DC-2015-11-24 

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