Paper Abstract and Keywords |
Presentation |
2015-11-26 10:30
Study on AlGaN formation on alpha-(AlGa)2O3 by surface nitridation using radio frequency nitrogen plasma Tsutomu Araki, Akira Buma, Nao Masuda, Yasushi Nanishi (Ritsumeikan Univ.), Masaya Oda, Toshimi Hitora (FLOSFIA) ED2015-68 CPM2015-103 LQE2015-100 Link to ES Tech. Rep. Archives: ED2015-68 CPM2015-103 LQE2015-100 |
Abstract |
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(See Japanese page) |
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Reference Info. |
IEICE Tech. Rep., vol. 115, no. 331, LQE2015-100, pp. 1-4, Nov. 2015. |
Paper # |
LQE2015-100 |
Date of Issue |
2015-11-19 (ED, CPM, LQE) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
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ED2015-68 CPM2015-103 LQE2015-100 Link to ES Tech. Rep. Archives: ED2015-68 CPM2015-103 LQE2015-100 |
Conference Information |
Committee |
ED LQE CPM |
Conference Date |
2015-11-26 - 2015-11-27 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Osaka City University Media Center |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Nitride Semiconductor Devices, Materials, Related Technologies |
Paper Information |
Registration To |
LQE |
Conference Code |
2015-11-ED-LQE-CPM |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Study on AlGaN formation on alpha-(AlGa)2O3 by surface nitridation using radio frequency nitrogen plasma |
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1st Author's Name |
Tsutomu Araki |
1st Author's Affiliation |
Ritsumeikan University (Ritsumeikan Univ.) |
2nd Author's Name |
Akira Buma |
2nd Author's Affiliation |
Ritsumeikan University (Ritsumeikan Univ.) |
3rd Author's Name |
Nao Masuda |
3rd Author's Affiliation |
Ritsumeikan University (Ritsumeikan Univ.) |
4th Author's Name |
Yasushi Nanishi |
4th Author's Affiliation |
Ritsumeikan University (Ritsumeikan Univ.) |
5th Author's Name |
Masaya Oda |
5th Author's Affiliation |
FLOSFIA INC. (FLOSFIA) |
6th Author's Name |
Toshimi Hitora |
6th Author's Affiliation |
FLOSFIA INC. (FLOSFIA) |
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Speaker |
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Date Time |
2015-11-26 10:30:00 |
Presentation Time |
25 minutes |
Registration for |
LQE |
Paper # |
ED2015-68, CPM2015-103, LQE2015-100 |
Volume (vol) |
vol.115 |
Number (no) |
no.329(ED), no.330(CPM), no.331(LQE) |
Page |
pp.1-4 |
#Pages |
4 |
Date of Issue |
2015-11-19 (ED, CPM, LQE) |
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