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Paper Abstract and Keywords
Presentation 2015-10-30 15:30
Study of process temperature of Al2O3 atomic layer deposition using high accuracy process gasses supply controller
Hisaya Sugita, Yasumasa Koda, Tomoyuki Suwa, Rihito Kuroda, Tetsuya Goto, Hidekazu Ishii (Tohoku Univ.), Satoru Yamashita (Fujikin), Akinobu Teramoto, Shigetoshi Sugawa, Tadahiro Ohmi (Tohoku Univ.) SDM2015-83 Link to ES Tech. Rep. Archives: SDM2015-83
Abstract (in Japanese) (See Japanese page) 
(in English) (Not available yet)
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(in English) / / / / / / /  
Reference Info. IEICE Tech. Rep., vol. 115, no. 280, SDM2015-83, pp. 63-68, Oct. 2015.
Paper # SDM2015-83 
Date of Issue 2015-10-22 (SDM) 
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380
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All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF SDM2015-83 Link to ES Tech. Rep. Archives: SDM2015-83

Conference Information
Committee SDM  
Conference Date 2015-10-29 - 2015-10-30 
Place (in Japanese) (See Japanese page) 
Place (in English) Niche, Tohoku Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Process Science and New Process Technology 
Paper Information
Registration To SDM 
Conference Code 2015-10-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Study of process temperature of Al2O3 atomic layer deposition using high accuracy process gasses supply controller 
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1st Author's Name Hisaya Sugita  
1st Author's Affiliation Tohoku University (Tohoku Univ.)
2nd Author's Name Yasumasa Koda  
2nd Author's Affiliation Tohoku University (Tohoku Univ.)
3rd Author's Name Tomoyuki Suwa  
3rd Author's Affiliation Tohoku University (Tohoku Univ.)
4th Author's Name Rihito Kuroda  
4th Author's Affiliation Tohoku University (Tohoku Univ.)
5th Author's Name Tetsuya Goto  
5th Author's Affiliation Tohoku University (Tohoku Univ.)
6th Author's Name Hidekazu Ishii  
6th Author's Affiliation Tohoku University (Tohoku Univ.)
7th Author's Name Satoru Yamashita  
7th Author's Affiliation Fujikin Incorporated (Fujikin)
8th Author's Name Akinobu Teramoto  
8th Author's Affiliation Tohoku University (Tohoku Univ.)
9th Author's Name Shigetoshi Sugawa  
9th Author's Affiliation Tohoku University (Tohoku Univ.)
10th Author's Name Tadahiro Ohmi  
10th Author's Affiliation Tohoku University (Tohoku Univ.)
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Speaker
Date Time 2015-10-30 15:30:00 
Presentation Time 30 
Registration for SDM 
Paper # IEICE-SDM2015-83 
Volume (vol) IEICE-115 
Number (no) no.280 
Page pp.63-68 
#Pages IEICE-6 
Date of Issue IEICE-SDM-2015-10-22 


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