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Paper Abstract and Keywords
Presentation 2015-09-03 15:20
Growth of c-axis parallel oriented ZnO film by RF magnetron sputtering at low gas pressure and its application in SAW and Lamb wave devices
Shinji Takayanagi (Doshisha Univ.), Takahiko Yanagitani (Waseda Univ.), Jean-Claude Gerbedoen, Abdelkrim Talbi (IEMN), Mami Matsukawa (Doshisha Univ.), Philippe Pernod (IEMN) US2015-50
Abstract (in Japanese) (See Japanese page) 
(in English) ZnO piezoelectric films are widely used for acoustic wave devices. In most cases the (0001) oriented ZnO films were used. On the other hand, c-axis parallel oriented ZnO films have unique anisotropy of elastic properties enabling to generate acoustic waves with high electromechanical coupling coefficient K2. We demonstrated c-axis parallel oriented ZnO film growth by RF magnetron sputtering at low gas pressure. In theoretical analyses, values of K2, up to 3.8% for sezawa mode SAW and up to 10.5% for the first symmetrical Lamb wave mode, can be achieved with this film. Then, we fabricated SAW and Lamb wave devices, and measure the insertion loss characteristics.
Keyword (in Japanese) (See Japanese page) 
(in English) ZnO film / c-Axis parallel oriented film / Sputtering method / Negative ion bombardment / SAW / Lamb wave / /  
Reference Info. IEICE Tech. Rep., vol. 115, no. 207, US2015-50, pp. 25-30, Sept. 2015.
Paper # US2015-50 
Date of Issue 2015-08-27 (US) 
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380
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All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee US  
Conference Date 2015-09-03 - 2015-09-04 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English) General 
Paper Information
Registration To US 
Conference Code 2015-09-US 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Growth of c-axis parallel oriented ZnO film by RF magnetron sputtering at low gas pressure and its application in SAW and Lamb wave devices 
Sub Title (in English)  
Keyword(1) ZnO film  
Keyword(2) c-Axis parallel oriented film  
Keyword(3) Sputtering method  
Keyword(4) Negative ion bombardment  
Keyword(5) SAW  
Keyword(6) Lamb wave  
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Keyword(8)  
1st Author's Name Shinji Takayanagi  
1st Author's Affiliation Doshisha University (Doshisha Univ.)
2nd Author's Name Takahiko Yanagitani  
2nd Author's Affiliation Waseda University (Waseda Univ.)
3rd Author's Name Jean-Claude Gerbedoen  
3rd Author's Affiliation Institute of Electronics, Microelectronics and Nanotechnology (IEMN)
4th Author's Name Abdelkrim Talbi  
4th Author's Affiliation Institute of Electronics, Microelectronics and Nanotechnology (IEMN)
5th Author's Name Mami Matsukawa  
5th Author's Affiliation Doshisha University (Doshisha Univ.)
6th Author's Name Philippe Pernod  
6th Author's Affiliation Institute of Electronics, Microelectronics and Nanotechnology (IEMN)
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Speaker
Date Time 2015-09-03 15:20:00 
Presentation Time 30 
Registration for US 
Paper # IEICE-US2015-50 
Volume (vol) IEICE-115 
Number (no) no.207 
Page pp.25-30 
#Pages IEICE-6 
Date of Issue IEICE-US-2015-08-27 


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