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| Presentation | 2015-09-03 15:50 Electromechanical coupling coefficients of c-axis parallel oriented ScAlN films grown by ion-beam assisted RF magnetron sputtering Mineki Oka, Shinji Takayanagi (Doshisha Univ.), Takahiko Yanagitani (Waseda Univ.), Mami Matsukawa (Doshisha Univ.)  US2015-51 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | Recently, Akiyama et al. found that doping scandium into AlN film increases the number of piezoelectric coefficient d33 fivefold, compared to AlN film. We previously reported the electromechanical coupling coefficient k33 of Sc0.41Al0.59N film was 0.36. On the other hand, c-axis parallel oriented AlN film was grown by ion beam irradiation during AlN deposition. However, the electromechanical coupling coefficient k15 in ScAlN film has never been investigated. In this study, we prepared c-axis parallel oriented ScAlN films by using ion beam assisted RF magnetron sputtering and observed shear wave excitation with ScAlN films. These samples could excite pure shear wave and k15 increased by raising Sc concentration. k15 of Sc0.13Al0.87N film was 0.044. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | ScAlN film / ion-beam assisted sputtering / c-axis parallel oriented film / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 115, no. 207, US2015-51, pp. 31-35, Sept. 2015. | |
| Paper # | US2015-51 | |
| Date of Issue | 2015-08-27 (US) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | US2015-51 |
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| Conference Information | |
| Committee | US |
| Conference Date | 2015-09-03 - 2015-09-04 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | General |
| Paper Information | |
| Registration To | US |
| Conference Code | 2015-09-US |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Electromechanical coupling coefficients of c-axis parallel oriented ScAlN films grown by ion-beam assisted RF magnetron sputtering |
| Sub Title (in English) | |
| Keyword(1) | ScAlN film |
| Keyword(2) | ion-beam assisted sputtering |
| Keyword(3) | c-axis parallel oriented film |
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| 1st Author's Name | Mineki Oka |
| 1st Author's Affiliation | Doshisha University (Doshisha Univ.) |
| 2nd Author's Name | Shinji Takayanagi |
| 2nd Author's Affiliation | Doshisha University (Doshisha Univ.) |
| 3rd Author's Name | Takahiko Yanagitani |
| 3rd Author's Affiliation | Waseda University (Waseda Univ.) |
| 4th Author's Name | Mami Matsukawa |
| 4th Author's Affiliation | Doshisha University (Doshisha Univ.) |
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| Speaker | Author-1 |
| Date Time | 2015-09-03 15:50:00 |
| Presentation Time | 30 minutes |
| Registration for | US |
| Paper # | US2015-51 |
| Volume (vol) | vol.115 |
| Number (no) | no.207 |
| Page | pp.31-35 |
| #Pages | 5 |
| Date of Issue | 2015-08-27 (US) |
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