Paper Abstract and Keywords |
Presentation |
2015-08-10 14:40
Low temperature deposition of SiNx films as an insulating barrier Mayumi B. Takeyama, Masaru Sato (Kitami Inst. of Technol.), Yasushi Kobayashi, Yoshihiro Nakata, Tomoji Nakamura (Fujitsu Lab.), Atsushi Noya (Kitami Inst. of Technol.) CPM2015-34 Link to ES Tech. Rep. Archives: CPM2015-34 |
Abstract |
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Reference Info. |
IEICE Tech. Rep., vol. 115, no. 179, CPM2015-34, pp. 15-18, Aug. 2015. |
Paper # |
CPM2015-34 |
Date of Issue |
2015-08-03 (CPM) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
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CPM2015-34 Link to ES Tech. Rep. Archives: CPM2015-34 |
Conference Information |
Committee |
CPM |
Conference Date |
2015-08-10 - 2015-08-11 |
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(See Japanese page) |
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Registration To |
CPM |
Conference Code |
2015-08-CPM |
Language |
Japanese |
Title (in Japanese) |
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Title (in English) |
Low temperature deposition of SiNx films as an insulating barrier |
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1st Author's Name |
Mayumi B. Takeyama |
1st Author's Affiliation |
Kitami Institute of Technology (Kitami Inst. of Technol.) |
2nd Author's Name |
Masaru Sato |
2nd Author's Affiliation |
Kitami Institute of Technology (Kitami Inst. of Technol.) |
3rd Author's Name |
Yasushi Kobayashi |
3rd Author's Affiliation |
Fujitsu Laboratories (Fujitsu Lab.) |
4th Author's Name |
Yoshihiro Nakata |
4th Author's Affiliation |
Fujitsu Laboratories (Fujitsu Lab.) |
5th Author's Name |
Tomoji Nakamura |
5th Author's Affiliation |
Fujitsu Laboratories (Fujitsu Lab.) |
6th Author's Name |
Atsushi Noya |
6th Author's Affiliation |
Kitami Institute of Technology (Kitami Inst. of Technol.) |
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Speaker |
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Date Time |
2015-08-10 14:40:00 |
Presentation Time |
20 minutes |
Registration for |
CPM |
Paper # |
CPM2015-34 |
Volume (vol) |
vol.115 |
Number (no) |
no.179 |
Page |
pp.15-18 |
#Pages |
4 |
Date of Issue |
2015-08-03 (CPM) |
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