Paper Abstract and Keywords |
Presentation |
2015-05-28 15:15
Control of N composition of GaAsN alloy grown by surface nitridation Noriyuki Urakami, Keisuke Yamane, Hiroto Sekiguchi, Hiroshi Okada, Akihiro Wakahara (Toyohashi Tech.) ED2015-20 CPM2015-5 SDM2015-22 Link to ES Tech. Rep. Archives: ED2015-20 CPM2015-5 SDM2015-22 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
We researched growth conditions effect for N composition and luminescence property on dilute nitride GaAsN alloy grown by repeating surface nitridation and GaAs regrowth of few monolayer. Nitridation surface of GaAs (001) above 540 °C indicated the change process to N-stabilized surface by the increase of nitridation time because observation the RHEED patterns changed from (2×4) to (1×4) or (3×4). In cases of temperature below 540 °C, c(4×4)pattern of GaAs surface was same before and after nitridation. N composition of the GaAsN alloys strongly depended of the growth temperature, i.e.;, N composition saturated with 2.2% at 600 °C, but N composition at 550 °C increased by the increase of nitridation time. N composition was controlled between 1 to 5% by the variation of the growth temperature and thickness of GaAs overlayer. While the increase of interruption time after nitridation occurred the decrease of N composition, it had no practical impact on the luminescence properties. The thickness of GaAs overlayer was investigated to increase layer thickness of GaAsN alloy. The thickness of GaAs overlayer was necessary above 4 ML because of treatment of flatness of GaAs overlayer. The integrated RT-PL intensity of surface nitridation was increased 8 times higher than that of a conventional growth method. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Surface Nitridation / δ doping / Dilute nitride / III-V-N alloy / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 115, no. 63, ED2015-20, pp. 21-26, May 2015. |
Paper # |
ED2015-20 |
Date of Issue |
2015-05-21 (ED, CPM, SDM) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
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ED2015-20 CPM2015-5 SDM2015-22 Link to ES Tech. Rep. Archives: ED2015-20 CPM2015-5 SDM2015-22 |
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