Paper Abstract and Keywords |
Presentation |
2015-05-15 16:20
32x32 Strictly Non-Blocking Si-Wire Optical Path Switch Ken Tanizawa, Keijiro Suzuki, Munehiro Toyama, Minoru Ohtsuka, Nobuyuki Yokoyama, Kazuyuki Matsumaro, Miyoshi Seki, Keiji Koshino (AIST), Toshio Sugaya (Furukawa Electric), Satoshi Suda, Guangwei Cong (AIST), Toshio Kimura (Furukawa Electric), Kazuhiro Ikeda, Shu Namiki, Hitoshi Kawashima (AIST) OCS2015-8 OPE2015-8 Link to ES Tech. Rep. Archives: OPE2015-8 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
In order to realize dynamic optical path networks that transmit coarse-granular video traffics with ultra-low energy consumption, we have developed optical path switches based on silicon photonics technology. This paper reports an ultra-compact 32×32 path-independent-insertion-loss optical switch based on Si-wire waveguides. For scaling the port count of the optical switch, uniformity of the fabrication process and packaging technology for large number of electronic I/O are essential. We introduce advanced fabrication process using ArF immersion lithography on a 300-mm SOI wafer and flip-chip packaging technology using a ceramic interposer with a 0.5-mm pitch land grid array for the 32×32 optical path switch. The intra-die uniformity is highly improved, resulting in the estimated crosstalk of -20 dB and the on-chip loss of 15.8±0.8 dB. The flip-chip packaging enables two-dimensional arrangement of the pads on the chip, and small die footprint of 11×25 mm2 is achieved. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Optical switch / Silicon Photonics / Optical fiber communications / / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 115, no. 30, OCS2015-8, pp. 33-38, May 2015. |
Paper # |
OCS2015-8 |
Date of Issue |
2015-05-08 (OCS, OPE) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
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