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Paper Abstract and Keywords
Presentation 2015-05-14 10:05
NP-completeness of Routing Problem with Bend Constraint
Toshiyuki Hongo, Atsushi Takahashi (Tokyo Tech)
Abstract (in Japanese) (See Japanese page) 
(in English) Self-Aligned Quadruple Patterning (SAQP) in which side-wall process is repeated twice is an important manufacturing technique to realize tiny routing pattern in next generation lithography, however, every routing pattern is not realized.
In order to obtain SAQP feasible routing patterns, a routing pattern generation method in which a special 3-color grid is used was proposed.
In the routing pattern generation method, routing is classified into three according to the manufacturing process of SAQP.
Among them, routing corresponding to the last manufacturing process neither allow to branch off nor to bend at several grids.
Therefore, an algorithm that obtains a path between two vertices that satisfies bend constraint is required to obtain a routing that corresponds to the last manufacturing process.
In this paper, the problem deciding whether there exists a path that satisfies the bend constraint is proved to be NP-complete in general.
Keyword (in Japanese) (See Japanese page) 
(in English) Self-Aligned Quadruple Patterning / Bend Constraint / Routing Problem / NP-complete / / / /  
Reference Info. IEICE Tech. Rep., vol. 115, no. 21, VLD2015-3, pp. 13-18, May 2015.
Paper # VLD2015-3 
Date of Issue 2015-05-07 (VLD) 
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380

Conference Information
Committee VLD IPSJ-SLDM  
Conference Date 2015-05-14 - 2015-05-14 
Place (in Japanese) (See Japanese page) 
Place (in English) Kitakyushu International Conference Center 
Topics (in Japanese) (See Japanese page) 
Topics (in English) System Design, etc. 
Paper Information
Registration To VLD 
Conference Code 2015-05-VLD-SLDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) NP-completeness of Routing Problem with Bend Constraint 
Sub Title (in English)  
Keyword(1) Self-Aligned Quadruple Patterning  
Keyword(2) Bend Constraint  
Keyword(3) Routing Problem  
Keyword(4) NP-complete  
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1st Author's Name Toshiyuki Hongo  
1st Author's Affiliation Toyko Institute of technology (Tokyo Tech)
2nd Author's Name Atsushi Takahashi  
2nd Author's Affiliation Toyko Institute of technology (Tokyo Tech)
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Speaker
Date Time 2015-05-14 10:05:00 
Presentation Time 25 
Registration for VLD 
Paper # IEICE-VLD2015-3 
Volume (vol) IEICE-115 
Number (no) no.21 
Page pp.13-18 
#Pages IEICE-6 
Date of Issue IEICE-VLD-2015-05-07 


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