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| Presentation | 2014-07-11 11:15 Estimation of parylene-C diaphragm deformation induced by molecular adsorption on a Fabry-Perot interferometric biosensor Yoshihiro Masuya, Kazuhiro Takahashi, Ryo Ozawa, Makoto Ishida, Kazuaki Sawada (Toyohashi Univ.of Tech)  ED2014-52 Link to ES Tech. Rep. Archives: ED2014-52 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | We have recently developed a surface stress sensor based on a MEMS Fabry-Perot interferometer integrated with a photodiode, which utilizes the nonlinear optical transmittance change in the Fabry-Perot interference to enhance the sensitivity of the surface stress. Parylene-C was used as a deformable membrane in the sensor because of negligible residual stress and low Young’s modulus of 2.8 GPa, which provides a large deformation with respect to molecular adsorption. After immobilization of 2-pg anti-BSA on the Fabry–Perot sensor, we measured about 50 nm deformation by optical surface profiler and reflection spectrum. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | MEMS Fabry–Perot interferometer / biosensor / label-free / surface-stress / protein / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 114, no. 133, ED2014-52, pp. 39-43, July 2014. | |
| Paper # | ED2014-52 | |
| Date of Issue | 2014-07-03 (ED) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | ED2014-52 Link to ES Tech. Rep. Archives: ED2014-52 |
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| Conference Information | |
| Committee | ED |
| Conference Date | 2014-07-10 - 2014-07-11 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Toyohashi Univ. of Tech. VBL |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Sensing Devices, MEMS, etc |
| Paper Information | |
| Registration To | ED |
| Conference Code | 2014-07-ED |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Estimation of parylene-C diaphragm deformation induced by molecular adsorption on a Fabry-Perot interferometric biosensor |
| Sub Title (in English) | |
| Keyword(1) | MEMS Fabry–Perot interferometer |
| Keyword(2) | biosensor |
| Keyword(3) | label-free |
| Keyword(4) | surface-stress |
| Keyword(5) | protein |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Yoshihiro Masuya |
| 1st Author's Affiliation | Toyohashi University of Technology (Toyohashi Univ.of Tech) |
| 2nd Author's Name | Kazuhiro Takahashi |
| 2nd Author's Affiliation | Toyohashi University of Technology (Toyohashi Univ.of Tech) |
| 3rd Author's Name | Ryo Ozawa |
| 3rd Author's Affiliation | Toyohashi University of Technology (Toyohashi Univ.of Tech) |
| 4th Author's Name | Makoto Ishida |
| 4th Author's Affiliation | Toyohashi University of Technology (Toyohashi Univ.of Tech) |
| 5th Author's Name | Kazuaki Sawada |
| 5th Author's Affiliation | Toyohashi University of Technology (Toyohashi Univ.of Tech) |
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| Speaker | Author-1 |
| Date Time | 2014-07-11 11:15:00 |
| Presentation Time | 25 minutes |
| Registration for | ED |
| Paper # | ED2014-52 |
| Volume (vol) | vol.114 |
| Number (no) | no.133 |
| Page | pp.39-43 |
| #Pages | 5 |
| Date of Issue | 2014-07-03 (ED) |
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