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Paper Abstract and Keywords
Presentation 2014-05-29 15:55
Electrical characterization of corundum-structured oxides for device applications
Kentaro Kaneko, Norihiro Suzuki, Sam-Dong Lee, Masashi Kitajima, Kazuaki Akaiwa, Shizuo Fujita (Kyoto Univ.)
Abstract (in Japanese) (See Japanese page) 
(in English) We investigated electrical properties of α-In2O3 thin films fabricated on c-cut sapphire substrates by a mist chemical vapor deposition (CVD) technique. The temperature dependence of electron motilities and carrier concentrations indicated the influence of neutral impurity scattering at low temperature. These scattering seem to be derived from Fe in thin films from α-Fe2O3 buffer layers or stainless components of growth equipments.
Keyword (in Japanese) (See Japanese page) 
(in English) corundum structure / oxide / wide bandgap / semiconductor / alloy / / /  
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Conference Information
Committee CPM ED SDM  
Conference Date 2014-05-28 - 2014-05-29 
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Paper Information
Registration To CPM 
Conference Code 2014-05-CPM-ED-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Electrical characterization of corundum-structured oxides for device applications 
Sub Title (in English)  
Keyword(1) corundum structure  
Keyword(2) oxide  
Keyword(3) wide bandgap  
Keyword(4) semiconductor  
Keyword(5) alloy  
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1st Author's Name Kentaro Kaneko  
1st Author's Affiliation Kyoto University (Kyoto Univ.)
2nd Author's Name Norihiro Suzuki  
2nd Author's Affiliation Kyoto University (Kyoto Univ.)
3rd Author's Name Sam-Dong Lee  
3rd Author's Affiliation Kyoto University (Kyoto Univ.)
4th Author's Name Masashi Kitajima  
4th Author's Affiliation Kyoto University (Kyoto Univ.)
5th Author's Name Kazuaki Akaiwa  
5th Author's Affiliation Kyoto University (Kyoto Univ.)
6th Author's Name Shizuo Fujita  
6th Author's Affiliation Kyoto University (Kyoto Univ.)
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Speaker Author-1 
Date Time 2014-05-29 15:55:00 
Presentation Time 20 minutes 
Registration for CPM 
Paper #  
Volume (vol) vol.114 
Number (no) no.56(ED), no.57(CPM), no.58(SDM) 
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