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Paper Abstract and Keywords
Presentation 2013-12-20 15:00
Metal mirror assisted grating couplers between multilayered waveguides toward 3D optical interconnects
JoonHyun Kang, Yuki Atsumi, Yusuke Hayashi, Junichi Suzuki, Yuki Kuno, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai (Tokyo Tech) Link to ES Tech. Rep. Archives: OPE2013-142
Abstract (in Japanese) (See Japanese page) 
(in English) Silicon photonics for optical interconnects can further improve the signal transmission density by introducing multilayered structure. In this work, we used grating couplers with metal mirrors for the inter-layer connection in multi-layered a-Si:H waveguides. The coupling efficiency of 90%, which was around 3 times higher than that without metal mirrors, was estimated by 3D-FDTD simulation. Devices were fabricated by process temperatures below 300°C and the coupling efficiency of 83% was obtained for a device with the number of grating periods of 20.
Keyword (in Japanese) (See Japanese page) 
(in English) Silicon Photonics / Amorphous silicon / Inter-layer coupling / Grating coupler / Metal mirror / / /  
Reference Info. IEICE Tech. Rep., vol. 113, no. 370, OPE2013-142, pp. 25-30, Dec. 2013.
Paper # OPE2013-142 
Date of Issue 2013-12-13 (OPE) 
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380
Copyright
and
reproduction
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (No. 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)

Conference Information
Committee OPE  
Conference Date 2013-12-20 - 2013-12-20 
Place (in Japanese) (See Japanese page) 
Place (in English) Kikai-Shinko-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To OPE 
Conference Code 2013-12-OPE 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Metal mirror assisted grating couplers between multilayered waveguides toward 3D optical interconnects 
Sub Title (in English)  
Keyword(1) Silicon Photonics  
Keyword(2) Amorphous silicon  
Keyword(3) Inter-layer coupling  
Keyword(4) Grating coupler  
Keyword(5) Metal mirror  
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1st Author's Name JoonHyun Kang  
1st Author's Affiliation Tokyo Insitute of Technology (Tokyo Tech)
2nd Author's Name Yuki Atsumi  
2nd Author's Affiliation Tokyo Insitute of Technology (Tokyo Tech)
3rd Author's Name Yusuke Hayashi  
3rd Author's Affiliation Tokyo Insitute of Technology (Tokyo Tech)
4th Author's Name Junichi Suzuki  
4th Author's Affiliation Tokyo Insitute of Technology (Tokyo Tech)
5th Author's Name Yuki Kuno  
5th Author's Affiliation Tokyo Insitute of Technology (Tokyo Tech)
6th Author's Name Tomohiro Amemiya  
6th Author's Affiliation Tokyo Insitute of Technology (Tokyo Tech)
7th Author's Name Nobuhiko Nishiyama  
7th Author's Affiliation Tokyo Insitute of Technology (Tokyo Tech)
8th Author's Name Shigehisa Arai  
8th Author's Affiliation Tokyo Insitute of Technology (Tokyo Tech)
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Speaker
Date Time 2013-12-20 15:00:00 
Presentation Time 25 
Registration for OPE 
Paper # IEICE-OPE2013-142 
Volume (vol) IEICE-113 
Number (no) no.370 
Page pp.25-30 
#Pages IEICE-6 
Date of Issue IEICE-OPE-2013-12-13 


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