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Paper Abstract and Keywords
Presentation 2013-10-22 16:05
Electron ray tracing from Field Emitter Array incorporated with electrostatic lens
Hidekazu Murata, Hiroshi Shimoyama (Meijo Univ.), Yoichiro Neo, Hidenori Mimura (Shizuoka Univ.), Tomoya Yoshida, Masayoshi Nagao (AIST)
Abstract (in Japanese) (See Japanese page) 
(in English) Field emitter arrays (FEAs) incorporated with electrostatic lens are regarded as strong candidates for multi field emission sources for a multi-column, multi-beam direct write electron beam lithography system, because a high throughput, high resolution electron beam lithography system is strongly required as a substitute for a light optical lithography system in the next generation. So far, we have performed the analysis of the FEAs incorporated with electrostatic lens by means of direct ray tracing of electrons emitted from emitter surface. In the present study, a paraxial trajectory method has been used more systematically and quantitatively to evaluate the optical properties of the lens such as spherical and chromatic aberration coefficients. As a result, we have found that the paraxial trajectory method can be utilized for even FEAs having a fine structure with sufficient accuracy. From the obtained aberration coefficients, the electron optical brightness of the FEAs has been calculated and compared among three types of focusing electrode geometries, and a suitable geometry for the height and aperture size of the focusing electrode has also been obtained.
Keyword (in Japanese) (See Japanese page) 
(in English) Field Emitter Array / Focusing electrode / Electrostatic lens / Paraaxial ray / Aberration coefficient / Brightness / /  
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Conference Information
Committee ED  
Conference Date 2013-10-22 - 2013-10-23 
Place (in Japanese) (See Japanese page) 
Place (in English) Enreisou, Hokkaido Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Vacuum tube and vacuum nanoelectronics 
Paper Information
Registration To ED 
Conference Code 2013-10-ED 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Electron ray tracing from Field Emitter Array incorporated with electrostatic lens 
Sub Title (in English)  
Keyword(1) Field Emitter Array  
Keyword(2) Focusing electrode  
Keyword(3) Electrostatic lens  
Keyword(4) Paraaxial ray  
Keyword(5) Aberration coefficient  
Keyword(6) Brightness  
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Keyword(8)  
1st Author's Name Hidekazu Murata  
1st Author's Affiliation Meijo University (Meijo Univ.)
2nd Author's Name Hiroshi Shimoyama  
2nd Author's Affiliation Meijo University (Meijo Univ.)
3rd Author's Name Yoichiro Neo  
3rd Author's Affiliation Shizuoka University (Shizuoka Univ.)
4th Author's Name Hidenori Mimura  
4th Author's Affiliation Shizuoka University (Shizuoka Univ.)
5th Author's Name Tomoya Yoshida  
5th Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
6th Author's Name Masayoshi Nagao  
6th Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
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Speaker Author-1 
Date Time 2013-10-22 16:05:00 
Presentation Time 25 minutes 
Registration for ED 
Paper #  
Volume (vol) vol.113 
Number (no) no.257 
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