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Paper Abstract and Keywords
Presentation 2013-10-18 10:30
Introduction of the Bias Operation Hard X-ray Photoelectron Spectroscopy: Evaluation for Insulator/Si interface
Norihiro Ikeno, Kohki Nagata (Meiji Univ.), Hiroshi Oji, Ichiro Hirosawa (JASRI), Atsushi Ogura (Meiji Univ.) Link to ES Tech. Rep. Archives: SDM2013-94
Abstract (in Japanese) (See Japanese page) 
(in English) (Available after conference date)
Keyword (in Japanese) (See Japanese page) 
(in English) Bias operation-hard X-ray photoelectron spectroscopy / Gate insulator / Interface trap density / Synchrotron radiation / / / /  
Reference Info. IEICE Tech. Rep., vol. 113, no. 247, SDM2013-94, pp. 33-36, Oct. 2013.
Paper # SDM2013-94 
Date of Issue 2013-10-10 (SDM) 
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380
Copyright
and
reproduction
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (No. 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)

Conference Information
Committee SDM  
Conference Date 2013-10-17 - 2013-10-18 
Place (in Japanese) (See Japanese page) 
Place (in English) Niche, Tohoku Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Process Science and New Process Technology 
Paper Information
Registration To SDM 
Conference Code 2013-10-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Introduction of the Bias Operation Hard X-ray Photoelectron Spectroscopy: Evaluation for Insulator/Si interface 
Sub Title (in English)  
Keyword(1) Bias operation-hard X-ray photoelectron spectroscopy  
Keyword(2) Gate insulator  
Keyword(3) Interface trap density  
Keyword(4) Synchrotron radiation  
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1st Author's Name Norihiro Ikeno  
1st Author's Affiliation Meiji University (Meiji Univ.)
2nd Author's Name Kohki Nagata  
2nd Author's Affiliation Meiji University (Meiji Univ.)
3rd Author's Name Hiroshi Oji  
3rd Author's Affiliation Japan Synchrotron Radiation Research Institute (JASRI)
4th Author's Name Ichiro Hirosawa  
4th Author's Affiliation Japan Synchrotron Radiation Research Institute (JASRI)
5th Author's Name Atsushi Ogura  
5th Author's Affiliation Meiji University (Meiji Univ.)
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Speaker
Date Time 2013-10-18 10:30:00 
Presentation Time 30 
Registration for SDM 
Paper # IEICE-SDM2013-94 
Volume (vol) IEICE-113 
Number (no) no.247 
Page pp.33-36 
#Pages IEICE-4 
Date of Issue IEICE-SDM-2013-10-10 


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