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| Presentation | 2013-08-09 09:00 MEMS Microphones on InP Substrates for High Performance Digital Ultrasonic Sensors Shunya Fujino, Yuta Mizuno, Kazuhiro Takaoka, Masayuki Mori, Koichi Maezawa (Univ. of Toyama)  ED2013-44 Link to ES Tech. Rep. Archives: ED2013-44 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | This paper describes the fabrication process of the MEMS microphones on InP substrates. The process is based on ozone ashing of the photoresist to fabricate a hollow structure. This process was demonstrated to be damage-free, and suitable for integration with HEMTs. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | ultrasonic sensor / analog-to-digital converter / delta-sigma modulation / high electron mobility transistor / condenser microphone / InP / / | |
| Reference Info. | IEICE Tech. Rep., vol. 113, no. 176, ED2013-44, pp. 33-36, Aug. 2013. | |
| Paper # | ED2013-44 | |
| Date of Issue | 2013-08-01 (ED) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | ED2013-44 Link to ES Tech. Rep. Archives: ED2013-44 |
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| Conference Information | |
| Committee | ED |
| Conference Date | 2013-08-08 - 2013-08-09 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | University of Toyama |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Paper Information | |
| Registration To | ED |
| Conference Code | 2013-08-ED |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | MEMS Microphones on InP Substrates for High Performance Digital Ultrasonic Sensors |
| Sub Title (in English) | |
| Keyword(1) | ultrasonic sensor |
| Keyword(2) | analog-to-digital converter |
| Keyword(3) | delta-sigma modulation |
| Keyword(4) | high electron mobility transistor |
| Keyword(5) | condenser microphone |
| Keyword(6) | InP |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Shunya Fujino |
| 1st Author's Affiliation | University of Toyama (Univ. of Toyama) |
| 2nd Author's Name | Yuta Mizuno |
| 2nd Author's Affiliation | University of Toyama (Univ. of Toyama) |
| 3rd Author's Name | Kazuhiro Takaoka |
| 3rd Author's Affiliation | University of Toyama (Univ. of Toyama) |
| 4th Author's Name | Masayuki Mori |
| 4th Author's Affiliation | University of Toyama (Univ. of Toyama) |
| 5th Author's Name | Koichi Maezawa |
| 5th Author's Affiliation | University of Toyama (Univ. of Toyama) |
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| Speaker | Author-1 |
| Date Time | 2013-08-09 09:00:00 |
| Presentation Time | 25 minutes |
| Registration for | ED |
| Paper # | ED2013-44 |
| Volume (vol) | vol.113 |
| Number (no) | no.176 |
| Page | pp.33-36 |
| #Pages | 4 |
| Date of Issue | 2013-08-01 (ED) |
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