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Paper Abstract and Keywords
Presentation 2012-12-17 11:50
An Analysis and Evaluation of MOSFET Strain Sensor Using Pseudo-Hall Effect
Tetsuya Umetsu, Tomochika Harada, Sumio Okuyama, Koichi Matsushita (Yamagata Univ.) ICD2012-89 Link to ES Tech. Rep. Archives: ICD2012-89
Abstract (in Japanese) (See Japanese page) 
(in English) Recently, most of the LSI chip applies packaging process for protecting Si chip, but internal stress in Si chip may be generated. It is necessary to measure and evaluate internal stress, because the characteristics of circuit may be damaged or changed. However, integration area increases with the existing strain sensor because it can't integrate with other circuits. So, by using the MOSFET type stress detection element that utilizes the pseudo-Hall effect, it can be integrated without increasing integration area. In this paper, we design, analyze and evaluate a strain sensor based on MOSFET using pseudo-Hall effect.
Keyword (in Japanese) (See Japanese page) 
(in English) Pseudo-Hall Effect / MOSFET / Strain Sensor / / / / /  
Reference Info. IEICE Tech. Rep., vol. 112, no. 365, ICD2012-89, pp. 11-16, Dec. 2012.
Paper # ICD2012-89 
Date of Issue 2012-12-10 (ICD) 
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380
Copyright
and
reproduction
技術研究報告に掲載された論文の著作権はIEICEに帰属します.(許諾番号:10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ICD2012-89 Link to ES Tech. Rep. Archives: ICD2012-89

Conference Information
Committee ICD  
Conference Date 2012-12-17 - 2012-12-18 
Place (in Japanese) (See Japanese page) 
Place (in English) Tokyo Tech Front 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To ICD 
Conference Code 2012-12-ICD 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) An Analysis and Evaluation of MOSFET Strain Sensor Using Pseudo-Hall Effect 
Sub Title (in English)  
Keyword(1) Pseudo-Hall Effect  
Keyword(2) MOSFET  
Keyword(3) Strain Sensor  
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1st Author's Name Tetsuya Umetsu  
1st Author's Affiliation Yamagata University (Yamagata Univ.)
2nd Author's Name Tomochika Harada  
2nd Author's Affiliation Yamagata University (Yamagata Univ.)
3rd Author's Name Sumio Okuyama  
3rd Author's Affiliation Yamagata University (Yamagata Univ.)
4th Author's Name Koichi Matsushita  
4th Author's Affiliation Yamagata University (Yamagata Univ.)
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Speaker
Date Time 2012-12-17 11:50:00 
Presentation Time 25 
Registration for ICD 
Paper # IEICE-ICD2012-89 
Volume (vol) IEICE-112 
Number (no) no.365 
Page pp.11-16 
#Pages IEICE-6 
Date of Issue IEICE-ICD-2012-12-10 


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