Paper Abstract and Keywords |
Presentation |
2012-12-07 11:00
Surface Modification of Glass Substrate by Ion Beam Irradiation of Ionic Liquid BMIM-PF6 Mitsuaki Takeuchi, Takuya Hamaguchi, Hiromichi Ryuto, Gikan H. Takaoka (Kyoto Univ.) SDM2012-119 Link to ES Tech. Rep. Archives: SDM2012-119 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
Ionic liquids(ILs) are known to be potential solvents for green chemistry in the recent years,
which are molten salt at room temperature with a high ionic conductivity of order of 100 mS/cm and unmeasurably low vapor pressure.
In this study, we developed an ionic liquid ion source(ILIS) consisting of carbon tip and investigated irradiation effects on a glass substrate with respect to surface smoothing.
As a result, it was found that surface roughness irradiated with ion beam of BMIM-PF$_6$ at 4 kV and fluence of 1$\times$10$^{15}$ ions/cm$^2$ was decreased. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
ionic liquide / ion beam irradiation / glass / surface smoothing / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 112, no. 337, SDM2012-119, pp. 25-30, Dec. 2012. |
Paper # |
SDM2012-119 |
Date of Issue |
2012-11-30 (SDM) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
SDM2012-119 Link to ES Tech. Rep. Archives: SDM2012-119 |
Conference Information |
Committee |
SDM |
Conference Date |
2012-12-07 - 2012-12-07 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Kyoto Univ. (Katsura) |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Fabrication and Characterization of Si-related Materials and Devices |
Paper Information |
Registration To |
SDM |
Conference Code |
2012-12-SDM |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Surface Modification of Glass Substrate by Ion Beam Irradiation of Ionic Liquid BMIM-PF6 |
Sub Title (in English) |
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Keyword(1) |
ionic liquide |
Keyword(2) |
ion beam irradiation |
Keyword(3) |
glass |
Keyword(4) |
surface smoothing |
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1st Author's Name |
Mitsuaki Takeuchi |
1st Author's Affiliation |
Kyoto University (Kyoto Univ.) |
2nd Author's Name |
Takuya Hamaguchi |
2nd Author's Affiliation |
Kyoto University (Kyoto Univ.) |
3rd Author's Name |
Hiromichi Ryuto |
3rd Author's Affiliation |
Kyoto University (Kyoto Univ.) |
4th Author's Name |
Gikan H. Takaoka |
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Kyoto University (Kyoto Univ.) |
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Speaker |
Author-1 |
Date Time |
2012-12-07 11:00:00 |
Presentation Time |
15 minutes |
Registration for |
SDM |
Paper # |
SDM2012-119 |
Volume (vol) |
vol.112 |
Number (no) |
no.337 |
Page |
pp.25-30 |
#Pages |
6 |
Date of Issue |
2012-11-30 (SDM) |