Paper Abstract and Keywords |
Presentation |
2012-12-07 16:00
Fabrication of Ferroelectric Microstructures by Proton Beam Irradiation Masaki Yamaguchi, Kazuki Watanabe (Shibaura Inst. of Tech.), Yoichiro Masuda (Hachinohe Inst. of Tech.) SDM2012-134 Link to ES Tech. Rep. Archives: SDM2012-134 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
In the fabrication of micro-patterned ferroelectric bismuth titanate thin films were investigated. We use metal-octylate solutions as coating materials. Perovskite-phase bismuth titanate films without plate-like grains were formed over sintering temperature of 750 degree Celsius. Precursor micro-patterns were drawn by proton beam irradiation and development with toluene. The case of proton beam irradiation, shape of micro-patterns was just as a design. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Micro-Pattern / Bismuth Titanate / Proton Beam / Metal-Octylate / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 112, no. 337, SDM2012-134, pp. 113-117, Dec. 2012. |
Paper # |
SDM2012-134 |
Date of Issue |
2012-11-30 (SDM) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
SDM2012-134 Link to ES Tech. Rep. Archives: SDM2012-134 |
Conference Information |
Committee |
SDM |
Conference Date |
2012-12-07 - 2012-12-07 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Kyoto Univ. (Katsura) |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Fabrication and Characterization of Si-related Materials and Devices |
Paper Information |
Registration To |
SDM |
Conference Code |
2012-12-SDM |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Fabrication of Ferroelectric Microstructures by Proton Beam Irradiation |
Sub Title (in English) |
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Keyword(1) |
Micro-Pattern |
Keyword(2) |
Bismuth Titanate |
Keyword(3) |
Proton Beam |
Keyword(4) |
Metal-Octylate |
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1st Author's Name |
Masaki Yamaguchi |
1st Author's Affiliation |
Shibaura Institute of Techinology (Shibaura Inst. of Tech.) |
2nd Author's Name |
Kazuki Watanabe |
2nd Author's Affiliation |
Shibaura Institute of Techinology (Shibaura Inst. of Tech.) |
3rd Author's Name |
Yoichiro Masuda |
3rd Author's Affiliation |
Hachinohe Institute of Techinology (Hachinohe Inst. of Tech.) |
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Speaker |
Author-1 |
Date Time |
2012-12-07 16:00:00 |
Presentation Time |
15 minutes |
Registration for |
SDM |
Paper # |
SDM2012-134 |
Volume (vol) |
vol.112 |
Number (no) |
no.337 |
Page |
pp.113-117 |
#Pages |
5 |
Date of Issue |
2012-11-30 (SDM) |