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Paper Abstract and Keywords
Presentation 2012-12-07 16:00
Fabrication of Ferroelectric Microstructures by Proton Beam Irradiation
Masaki Yamaguchi, Kazuki Watanabe (Shibaura Inst. of Tech.), Yoichiro Masuda (Hachinohe Inst. of Tech.) SDM2012-134 Link to ES Tech. Rep. Archives: SDM2012-134
Abstract (in Japanese) (See Japanese page) 
(in English) In the fabrication of micro-patterned ferroelectric bismuth titanate thin films were investigated. We use metal-octylate solutions as coating materials. Perovskite-phase bismuth titanate films without plate-like grains were formed over sintering temperature of 750 degree Celsius. Precursor micro-patterns were drawn by proton beam irradiation and development with toluene. The case of proton beam irradiation, shape of micro-patterns was just as a design.
Keyword (in Japanese) (See Japanese page) 
(in English) Micro-Pattern / Bismuth Titanate / Proton Beam / Metal-Octylate / / / /  
Reference Info. IEICE Tech. Rep., vol. 112, no. 337, SDM2012-134, pp. 113-117, Dec. 2012.
Paper # SDM2012-134 
Date of Issue 2012-11-30 (SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
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reproduction
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF SDM2012-134 Link to ES Tech. Rep. Archives: SDM2012-134

Conference Information
Committee SDM  
Conference Date 2012-12-07 - 2012-12-07 
Place (in Japanese) (See Japanese page) 
Place (in English) Kyoto Univ. (Katsura) 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Fabrication and Characterization of Si-related Materials and Devices 
Paper Information
Registration To SDM 
Conference Code 2012-12-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Fabrication of Ferroelectric Microstructures by Proton Beam Irradiation 
Sub Title (in English)  
Keyword(1) Micro-Pattern  
Keyword(2) Bismuth Titanate  
Keyword(3) Proton Beam  
Keyword(4) Metal-Octylate  
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1st Author's Name Masaki Yamaguchi  
1st Author's Affiliation Shibaura Institute of Techinology (Shibaura Inst. of Tech.)
2nd Author's Name Kazuki Watanabe  
2nd Author's Affiliation Shibaura Institute of Techinology (Shibaura Inst. of Tech.)
3rd Author's Name Yoichiro Masuda  
3rd Author's Affiliation Hachinohe Institute of Techinology (Hachinohe Inst. of Tech.)
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Speaker Author-1 
Date Time 2012-12-07 16:00:00 
Presentation Time 15 minutes 
Registration for SDM 
Paper # SDM2012-134 
Volume (vol) vol.112 
Number (no) no.337 
Page pp.113-117 
#Pages
Date of Issue 2012-11-30 (SDM) 


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