Paper Abstract and Keywords |
Presentation |
2012-11-30 11:50
Fabrication of moth-eye patterned sapphire substrate (MPSS) and its application to LEDs Takayoshi Tsuchiya, Shinya Umeda, Mihoko Sowa (Meijo Univ.), Toshiyuki Kondo, Tsukasa Kitano, Midori Mori, Atsushi Suzuki, Koichi Naniwae, Hitoshi Sekine (ELSEED), Motoaki Iwaya, Tetsuya Takeuchi, Satoshi Kamiyama, Isamu Akasaki (Meijo Univ.) ED2012-82 CPM2012-139 LQE2012-110 Link to ES Tech. Rep. Archives: ED2012-82 CPM2012-139 LQE2012-110 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
Fabrication processes of a moth-eye patterned sapphire substrate (MPSS), which can enhance a light extraction efficiency of nitride-based light emitting diodes (LEDs) have been examined.
Optimization of structural parameters of MPSS for high-quality GaN growth was also performed. Then, we fabricated MPSS samples with a fixed pitch 460nm, and a height of corns of 250, 300 and 350nm. Light extraction efficiency of blue-LEDs growth on a series of MPSS was enhanced 1.4 times as compared with the devices grown on a flat sapphire substrate, while there is no dependence of height of corns on LED performance. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
PSS / Moth-eye / UV-nanoimprinting technique / Dry etching / LEDs / / / |
Reference Info. |
IEICE Tech. Rep., vol. 112, no. 329, LQE2012-110, pp. 75-80, Nov. 2012. |
Paper # |
LQE2012-110 |
Date of Issue |
2012-11-22 (ED, CPM, LQE) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
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ED2012-82 CPM2012-139 LQE2012-110 Link to ES Tech. Rep. Archives: ED2012-82 CPM2012-139 LQE2012-110 |
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