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| Presentation | 2012-09-24 14:45 Fabrication of polarity-inverted ZnO films using ion bombardment to the substrate during an RF magnetron sputtering Ryo Ikoma (Doshisha Univ.), Takahiko Yanagitani (Nagoya Inst.Tech.), Shinji Takayanagi (Doshisha Univ.), Masashi Suzuki (Nagoya Inst.Tech.), Hiroyuki Odagawa (Kumamoto NCT), Mami Matsukawa (Doshisha Univ.)  US2012-61 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | ZnO have been used as SAW devices and high frequency transducer owing to its high electromechanical coupling. In general, ZnO films deposited by sputtering method have O-polar surface. On the other hand, it is known that AlN films deposited by sputtering have Al-polar surface. In case of AlN, we have reported that the O- negative ion bombardment induces unusual N-polar AlN film growth. We then considered that Zn- or O- polarization control could also be achieved by using ion bonbardment during RF magnetron sputtering. To investigate the contribution of positive and negative ion bombardment to O-polar ZnO films growth, two types of ZnO films were fabricated on Al film/silica glass substrates by changing RF power of 100 W or 200 W during RF magnetron sputtering. The amount of ion bombardment to the substrate surface was quantitatively measured using an energy analyzer with Q-mass. Polarization of the films was determined by piezoelectric response due to the compression stress applied to the specimen. As a result, we had succeed the fabracation of the unusual O-polar ZnO film under strong ion bonbardment condition. Control of Zn- or O-polar c-axis oriented ZnO films has a potential to realize new functional piezoelectric devices. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Polarization control / ZnO film / Ion bombardment / RF magnetron sputtering / Thickness extensional mode / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 112, no. 213, US2012-61, pp. 21-25, Sept. 2012. | |
| Paper # | US2012-61 | |
| Date of Issue | 2012-09-17 (US) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | US2012-61 |
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| Conference Information | |
| Committee | US |
| Conference Date | 2012-09-24 - 2012-09-24 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Tegata Campus, Akita Univ. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | General |
| Paper Information | |
| Registration To | US |
| Conference Code | 2012-09-US |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of polarity-inverted ZnO films using ion bombardment to the substrate during an RF magnetron sputtering |
| Sub Title (in English) | |
| Keyword(1) | Polarization control |
| Keyword(2) | ZnO film |
| Keyword(3) | Ion bombardment |
| Keyword(4) | RF magnetron sputtering |
| Keyword(5) | Thickness extensional mode |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Ryo Ikoma |
| 1st Author's Affiliation | Doshisha University (Doshisha Univ.) |
| 2nd Author's Name | Takahiko Yanagitani |
| 2nd Author's Affiliation | Nagoya Institute of Technology (Nagoya Inst.Tech.) |
| 3rd Author's Name | Shinji Takayanagi |
| 3rd Author's Affiliation | Doshisha University (Doshisha Univ.) |
| 4th Author's Name | Masashi Suzuki |
| 4th Author's Affiliation | Nagoya Institute of Technology (Nagoya Inst.Tech.) |
| 5th Author's Name | Hiroyuki Odagawa |
| 5th Author's Affiliation | Kumamoto National College of Technology (Kumamoto NCT) |
| 6th Author's Name | Mami Matsukawa |
| 6th Author's Affiliation | Doshisha University (Doshisha Univ.) |
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| Speaker | Author-1 |
| Date Time | 2012-09-24 14:45:00 |
| Presentation Time | 25 minutes |
| Registration for | US |
| Paper # | US2012-61 |
| Volume (vol) | vol.112 |
| Number (no) | no.213 |
| Page | pp.21-25 |
| #Pages | 5 |
| Date of Issue | 2012-09-17 (US) |
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