| 講演抄録／キーワード |
| 講演名 |
2012-06-28 09:30
Lead Zirconate Titanate Acoustic Energy Harvesters for use in high sound pressure environments
○Tomohiro Matsuda・Saori Hagiwara・Shuntaro Miyake・Kazuki Tomii・Satoshi Iizumi・Shungo Tomioka・Shu Kimura・Kyohei Tsujimoto・Yusuke Uchida・Yasushiro Nishioka（Nihon Univ.） エレソ技報アーカイブはこちら |
| 抄録 |
（和） |
Acoustic energy harvesters, that function in an environment where sound pressure is extremely high (~150 dB) such as in an engine room of an aircraft, are requested to power wireless health monitoring systems. This paper presents improved power generation performances of a lead zirconate titanate (PZT) microelectromechanical systems (MEMS) acoustic energy harvester having dual top electrodes to utilize different polarizations of charges on the surface of a vibrating PZT diaphragm. The PZT acoustic energy harvester had a diaphragm with a diameter of 2 mm consisting of Al(0.1 m)/PZT(1 m)/Pt(0.1 m)/Ti(0.1 m)/SiO2(1.5 m). The top Al electrodes independently cover the peripheral surface and the central surface of the PZT diaphragm. The combined device consisting of the peripheral harvester and central harvester generated a power of 8.28x10-11 W under the sound pressure level of 100 dB (0.01 W/m2) at the first resonance frequency of 4.92 kHz. The estimated generated power extrapolated at the sound pressure level of 150 dB obtained from the relationships between generated power and sound pressure was 10-20 nW using a sound collecting cone. |
| （英） |
Acoustic energy harvesters, that function in an environment where sound pressure is extremely high (~150 dB) such as in an engine room of an aircraft, are requested to power wireless health monitoring systems. This paper presents improved power generation performances of a lead zirconate titanate (PZT) microelectromechanical systems (MEMS) acoustic energy harvester having dual top electrodes to utilize different polarizations of charges on the surface of a vibrating PZT diaphragm. The PZT acoustic energy harvester had a diaphragm with a diameter of 2 mm consisting of Al(0.1 m)/PZT(1 m)/Pt(0.1 m)/Ti(0.1 m)/SiO2(1.5 m). The top Al electrodes independently cover the peripheral surface and the central surface of the PZT diaphragm. The combined device consisting of the peripheral harvester and central harvester generated a power of 8.28x10-11 W under the sound pressure level of 100 dB (0.01 W/m2) at the first resonance frequency of 4.92 kHz. The estimated generated power extrapolated at the sound pressure level of 150 dB obtained from the relationships between generated power and sound pressure was 10-20 nW using a sound collecting cone. |
| キーワード |
（和） |
PZT / Acoustic / Energy harvester / / / / / |
| （英） |
PZT / Acoustic / Energy harvester / / / / / |
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