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Paper Abstract and Keywords
Presentation 2012-06-22 14:20
Electronic properties of ZnO thin films grown on a-sapphire substrates using high-energy H2O generated by a catalytic reaction -- Analysis using a two layer model --
Eichi Nagatomi, Naoya Yamaguchi, Takahiro Kato (Nagaoka Univ. Technol.), Hironobu Umemoto (Shizuoka Univ.), Kanji Yasui (Nagaoka Univ. Technol.) EMD2012-9 CPM2012-26 OME2012-33 Link to ES Tech. Rep. Archives: EMD2012-9 CPM2012-26 OME2012-33
Abstract (in Japanese) (See Japanese page) 
(in English) Electrical properties of ZnO thin films, which were grown through a reaction between dimethylzinc and high-energy $H_2O$ produced by a Pt-catalyzed $H_2$ $O_2$ reaction, were measured. The films were grown directly on a-plane (11-20) sapphire substrates at 773 K without a buffer layer. As electron mobility increased with film thickness until approximately 3$\mu$m, it was presumed that the ZnO films were composed of an initial growth layer with high density of defects and an upper layer with excellent crystallinity. By using a two-layer model, we estimated the electron mobility in the upper layer. The electron mobility, however, cannot be completely revised by the two-layer model.
Keyword (in Japanese) (See Japanese page) 
(in English) ZnO / CVD / / / / / /  
Reference Info. IEICE Tech. Rep., vol. 112, no. 96, CPM2012-26, pp. 7-11, June 2012.
Paper # CPM2012-26 
Date of Issue 2012-06-15 (EMD, CPM, OME) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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Download PDF EMD2012-9 CPM2012-26 OME2012-33 Link to ES Tech. Rep. Archives: EMD2012-9 CPM2012-26 OME2012-33

Conference Information
Committee EMD CPM OME  
Conference Date 2012-06-22 - 2012-06-22 
Place (in Japanese) (See Japanese page) 
Place (in English) Kikai-Shinko-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Summer meeting for materials and devices 
Paper Information
Registration To CPM 
Conference Code 2012-06-EMD-CPM-OME 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Electronic properties of ZnO thin films grown on a-sapphire substrates using high-energy H2O generated by a catalytic reaction 
Sub Title (in English) Analysis using a two layer model 
Keyword(1) ZnO  
Keyword(2) CVD  
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1st Author's Name Eichi Nagatomi  
1st Author's Affiliation Nagaoka University of Technology (Nagaoka Univ. Technol.)
2nd Author's Name Naoya Yamaguchi  
2nd Author's Affiliation Nagaoka University of Technology (Nagaoka Univ. Technol.)
3rd Author's Name Takahiro Kato  
3rd Author's Affiliation Nagaoka University of Technology (Nagaoka Univ. Technol.)
4th Author's Name Hironobu Umemoto  
4th Author's Affiliation Shizuoka University (Shizuoka Univ.)
5th Author's Name Kanji Yasui  
5th Author's Affiliation Nagaoka University of Technology (Nagaoka Univ. Technol.)
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Speaker Author-1 
Date Time 2012-06-22 14:20:00 
Presentation Time 25 minutes 
Registration for CPM 
Paper # EMD2012-9, CPM2012-26, OME2012-33 
Volume (vol) vol.112 
Number (no) no.95(EMD), no.96(CPM), no.97(OME) 
Page pp.7-11 
#Pages
Date of Issue 2012-06-15 (EMD, CPM, OME) 


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