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| Presentation | 2012-05-18 15:40 A tunable color filter based on sub-wavelength gratings using electrostatic microactuator Hiroaki Honma, Hajime Miyao, Kazuhiro Takahashi, Makoto Ishida, Kazuaki Sawada (Toyohashi Tech.)  ED2012-39 CPM2012-23 SDM2012-41 Link to ES Tech. Rep. Archives: ED2012-39 CPM2012-23 SDM2012-41 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | Sub-wavelength grating have The guided-mode resonance was obtained in surface of sub-wavelength grating. Particular wavelength reflected when resonance occurs. We have proposed a NEMS (Nano Electro Mechanical Systems) tunable color filter using electrostatic microactuator which can control the guided-mode resonance by tuning periodic structure. The sub-wavelength gratings were fabricated using SOI (Silicon on Insulator) wafer. The free-standing nano periodic structure was successfully developed by wet sacrificial etching using buffered HF and supercritical CO2 drying technique. Color tuning from yellow to green was obtained by drive voltage of 20 V. For low voltage driving, a color filter using another NEMS actuator with three pairs of electrode was also developed. We obtained the reflected light attenuation by 34 % at 680 nm wavelength with drive voltage of 6.7 V. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Sub-wavelength grating / Tunable color filter / MEMS/NEMS / SOI / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 112, no. 32, ED2012-39, pp. 111-115, May 2012. | |
| Paper # | ED2012-39 | |
| Date of Issue | 2012-05-10 (ED, CPM, SDM) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | ED2012-39 CPM2012-23 SDM2012-41 Link to ES Tech. Rep. Archives: ED2012-39 CPM2012-23 SDM2012-41 |
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| Conference Information | |
| Committee | ED SDM CPM |
| Conference Date | 2012-05-17 - 2012-05-18 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | VBL, Toyohashi Univ. of Technol. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Paper Information | |
| Registration To | ED |
| Conference Code | 2012-05-ED-SDM-CPM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A tunable color filter based on sub-wavelength gratings using electrostatic microactuator |
| Sub Title (in English) | |
| Keyword(1) | Sub-wavelength grating |
| Keyword(2) | Tunable color filter |
| Keyword(3) | MEMS/NEMS |
| Keyword(4) | SOI |
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| 1st Author's Name | Hiroaki Honma |
| 1st Author's Affiliation | Toyohashi University of Technology (Toyohashi Tech.) |
| 2nd Author's Name | Hajime Miyao |
| 2nd Author's Affiliation | Toyohashi University of Technology (Toyohashi Tech.) |
| 3rd Author's Name | Kazuhiro Takahashi |
| 3rd Author's Affiliation | Toyohashi University of Technology (Toyohashi Tech.) |
| 4th Author's Name | Makoto Ishida |
| 4th Author's Affiliation | Toyohashi University of Technology (Toyohashi Tech.) |
| 5th Author's Name | Kazuaki Sawada |
| 5th Author's Affiliation | Toyohashi University of Technology (Toyohashi Tech.) |
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| Speaker | Author-1 |
| Date Time | 2012-05-18 15:40:00 |
| Presentation Time | 25 minutes |
| Registration for | ED |
| Paper # | ED2012-39, CPM2012-23, SDM2012-41 |
| Volume (vol) | vol.112 |
| Number (no) | no.32(ED), no.33(CPM), no.34(SDM) |
| Page | pp.111-115 |
| #Pages | 5 |
| Date of Issue | 2012-05-10 (ED, CPM, SDM) |
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