Paper Abstract and Keywords |
Presentation |
2011-11-29 13:50
[Invited Talk]
Integrated CMOS-MEMS Technology and Its Applications Hiroki Morimura, Toshishige Shimamura, Kei Kuwabara, Kazuyoshi Ono (NTT), Katsuyuki Machida (NTT-AT) CPM2011-158 ICD2011-90 Link to ES Tech. Rep. Archives: CPM2011-158 ICD2011-90 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
The paper describes integrated CMOS-MEMS technology and its applications. We discuss the features of integrated complementary metal–oxide–semi- conductor-microelectromechanical systems (CMOS- MEMS). The prospect of this integration is also presented. A MEMS fingerprint sensor and a low-voltage radio frequency (RF) CMOS-MEMS switch are the case studies discussed. Moreover, Power-MEMS generator and sub-nanowatt sensing circuit techniques for batteryless sensor-node with a nanowatt energy harvester are presented. In conclusion, it is confirmed that the integrated CMOS-MEMS technology will pave the way for the More than Moore technology. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
CMOS-MEMS technology / Sensor-MEMS / RF-MEMS / Power-MEMS / fingerprint sensor / multiband-RF / batteryless senor-node / energy harvesting |
Reference Info. |
IEICE Tech. Rep., vol. 111, no. 326, CPM2011-158, pp. 47-52, Nov. 2011. |
Paper # |
CPM2011-158 |
Date of Issue |
2011-11-21 (CPM, ICD) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
CPM2011-158 ICD2011-90 Link to ES Tech. Rep. Archives: CPM2011-158 ICD2011-90 |
|